Constraint Effects on Thin Film Channel Cracking Behavior
Tsui, Ting Y., McKerrow, Andrew J., Vlassak, Joost J.
Published in Journal of materials research (01.09.2005)
Published in Journal of materials research (01.09.2005)
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Journal Article
The effect of water diffusion on the adhesion of organosilicate glass film stacks
Tsui, Ting Y., McKerrow, Andrew J., Vlassak, Joost J.
Published in Journal of the mechanics and physics of solids (01.05.2006)
Published in Journal of the mechanics and physics of solids (01.05.2006)
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Journal Article
The effect of elastic modulus on channel crack propagation in organosilicate glass films
Tsui, Ting Y., Griffin, A.J., Fields, Russell, Jacques, Jeannette M., McKerrow, Andrew J., Vlassak, Joost J.
Published in Thin solid films (05.12.2006)
Published in Thin solid films (05.12.2006)
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Journal Article
Materials Issues and Characterization of Low-k Dielectric Materials
Ryan, E. Todd, McKerrow, Andrew J., Leu, Jihperng, Ho, Paul S.
Published in MRS bulletin (01.10.1997)
Published in MRS bulletin (01.10.1997)
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Journal Article
Aggregation of squaraine dyes: Structure-property relationships and solvent effects
McKerrow, Andrew J, Buncel, Erwin, Kazmaier, Peter M
Published in Canadian journal of chemistry (01.10.1995)
Published in Canadian journal of chemistry (01.10.1995)
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Journal Article
Thin film interaction between low- k dielectric hydrogen silsesquioxane (HSQ) and Ti barrier layer
Zeng, Yuxiao, Russell, Stephen W., McKerrow, Andrew J., Chen, Peijun, Alford, T.L.
Published in Thin solid films (01.02.2000)
Published in Thin solid films (01.02.2000)
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Journal Article
유전체 박막 증착을 위한 변압기 커플링 플라즈마 (TRANSFORMER COUPLED PLASMA) 소스 설계
KHOJASTEH MALAK, GUI ZHE, GONG BO, CHEN LEE, MCKERROW ANDREW JOHN, QIU HUATAN, JUAREZ FRANCISCO J, GUO TONGTONG, BATZER RACHEL E
Year of Publication 02.04.2024
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Year of Publication 02.04.2024
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SiCxOy를 위한 핵생성 층으로서 SixNy
MCKERROW ANDREW, VARADARAJAN BHADRI, GONG BO, LAI FENGYUAN, YUAN GUANGBI, NARKEVICIUTE IEVA
Year of Publication 29.12.2021
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Year of Publication 29.12.2021
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칼코게나이드 재료들의 컨포멀한 손상-프리 캡슐화
RAI VIKRANT, HOANG JOHN, QIAN DANNA, SIMS JAMES SAMUEL, MCKERROW ANDREW JOHN, KELCHNER KATHRYN MERCED, LILL THORSTEN BERND, TANG SHANE, DULKIN ALEXANDER, SHEN MEIHUA
Year of Publication 06.04.2021
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Year of Publication 06.04.2021
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할라이드-기반 전구체들을 사용하여 금속 프리 ALD 실리콘 나이트라이드 막들을 증착하는 방법
CHANDRASEKHARAN RAMESH, MCKERROW ANDREW JOHN, KELCHNER KATHRYN MERCED, HENRI JON, SIMS JAMES S, VARADARAJAN SESHASAYEE
Year of Publication 15.05.2019
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Year of Publication 15.05.2019
Patent