Dielectric relaxation study of hydrogen exposure as a source of two-level systems in Al2O3
JAMESON, John R, NGO, D, BENKO, C, MCVITTIE, J. P, NISHI, Y, YOUNG, B. A
Published in Journal of non-crystalline solids (01.05.2011)
Published in Journal of non-crystalline solids (01.05.2011)
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Journal Article
Electrical properties of heavily doped polycrystalline silicon-germanium films
King, T.-J., McVittie, J.P., Saraswat, K.C., Pfiester, J.R.
Published in IEEE transactions on electron devices (01.02.1994)
Published in IEEE transactions on electron devices (01.02.1994)
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Journal Article
Air-gap formation during IMD deposition to lower interconnect capacitance
Shieh, B., Saraswat, K.C., McVittie, J.P., List, S., Nag, S., Islamraja, M., Havemann, R.H.
Published in IEEE electron device letters (01.01.1998)
Published in IEEE electron device letters (01.01.1998)
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Journal Article
Simulation of mass transport for deposition in via holes and trenches
WULU, H. C, SARASWAT, K. C, MCVITTIE, J. P
Published in Journal of the Electrochemical Society (01.06.1991)
Published in Journal of the Electrochemical Society (01.06.1991)
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Journal Article
Plasma-parameter dependence of thin-oxide damage from wafer charging during electron-cyclotron-resonance plasma processing
Friedmann, J.B., Shohet, J.L., Mau, R., Hershkowitz, N., Bisgaard, S., Shawming Ma, McVittie, J.P.
Published in IEEE transactions on semiconductor manufacturing (01.02.1997)
Published in IEEE transactions on semiconductor manufacturing (01.02.1997)
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Journal Article
Two-dimensional thermal oxidation of silicon. II. Modeling stress effects in wet oxides
Kao, D.-B., McVittie, J.P., Nix, W.D., Saraswat, K.C.
Published in IEEE transactions on electron devices (01.01.1988)
Published in IEEE transactions on electron devices (01.01.1988)
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Journal Article
High frequency C-V investigation of metal-oxide-semiconductor capacitors prepared by low temperature subatmospheric pressure chemical vapour deposition of SiO2 films on silicon substrates
PAVELESCU, C, MCVITTIE, J. P, CHANG, C, SARASWAT, K. C, LEONG, J. Y
Published in Thin solid films (30.09.1992)
Published in Thin solid films (30.09.1992)
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Journal Article
Hydrogenation by ion implantation for scaled SOI/PMOS transistors
Singh, H.J., Saraswat, K.C., Shott, J.D., McVittie, J.P., Meindl, J.D.
Published in IEEE electron device letters (01.03.1985)
Published in IEEE electron device letters (01.03.1985)
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Journal Article
Electrical endpoint detection of VLSI contact plasma etching
Chang, G., McVittie, J.P., Walker, J.T., Dutton, R.W.
Published in IEEE electron device letters (01.12.1984)
Published in IEEE electron device letters (01.12.1984)
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Journal Article
A lateral silicon-on-insulator bipolar transistor with a self-aligned base contact
Sturm, J.C., McVittie, J.P., Gibbons, J.F., Pfeiffer, L.
Published in IEEE electron device letters (01.03.1987)
Published in IEEE electron device letters (01.03.1987)
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Journal Article
Ge-Interface Engineering With Ozone Oxidation for Low Interface-State Density
Kuzum, D., Krishnamohan, T., Pethe, A.J., Okyay, A.K., Oshima, Y., Yun Sun, McVittie, J.P., Pianetta, P.A., McIntyre, P.C., Saraswat, K.C.
Published in IEEE electron device letters (01.04.2008)
Published in IEEE electron device letters (01.04.2008)
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Journal Article
Robust, stable, and accurate boundary movement for physical etching and deposition simulation
Ze-Kai Hsiau, Kan, E.C., McVittie, J.P., Dutton, R.W.
Published in IEEE transactions on electron devices (01.09.1997)
Published in IEEE transactions on electron devices (01.09.1997)
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Journal Article
Modeling of oxide breakdown from gate charging during resist ashing
Fang, S., Murakawa, S., McVittie, J.P.
Published in IEEE transactions on electron devices (01.10.1994)
Published in IEEE transactions on electron devices (01.10.1994)
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Journal Article
Annealing of oxide fixed charges in scaled polysilicon gate MOS structures
Dah-Bin Kao, Saraswat, K.C., McVittie, J.P.
Published in IEEE transactions on electron devices (01.01.1985)
Published in IEEE transactions on electron devices (01.01.1985)
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Journal Article
A High-Speed Multi-Channel Readout for SSPM Arrays
Janecek, M., Walder, J., McVittie, P. J., Zheng, B., von der Lippe, H., McClish, M., Dokhale, P., Stapels, C. J., Christian, J. F., Shah, K. S., Moses, W. W.
Published in IEEE transactions on nuclear science (01.02.2012)
Published in IEEE transactions on nuclear science (01.02.2012)
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