Design and operation of reactive gas delivery systems for IC fabrication plants
Yung-ho Chou, Tienpao Su, Chen, M.S.K., Fine, S.M., George, M.A., McGuire, J.T., Dheandhanoo, S., Yang, J.H., Ciotti, R.J., Yesenofski, D.F.
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
Published in 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) (2000)
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Conference Proceeding
Effects of microcontaminants in oxygen during gate oxide growth: interfacial effects and device reliability
Beck, S.E., George, M.A., Bohling, D.A., Shemanski, B.J., McGuire, J.T., Hames, G.A., Wortman, J.J., Lanford, W.A.
Published in Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) (1994)
Published in Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC) (1994)
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Conference Proceeding