Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source
BUNNELL, ROBERT A, ORSINI, ROCCO A, PETACH, MICHAEL B, MCGREGOR, ROY D
Year of Publication 28.08.2013
Get full text
Year of Publication 28.08.2013
Patent
Low vapor pressure, low debris solid target for euv production
ORSINI, ROCCO A, FORNACA, STEVEN W, PETACH, MICHAEL B, SHIELDS, HENRY, MICHAELIAN, MARK E, MCGREGOR, ROY D
Year of Publication 31.08.2011
Get full text
Year of Publication 31.08.2011
Patent
Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source
BUNNELL, ROBERT A, ORSINI, ROCCO A, PETACH, MICHAEL B, MCGREGOR, ROY D
Year of Publication 17.03.2010
Get full text
Year of Publication 17.03.2010
Patent
Low vapor pressure, low debris solid target for euv production
ORSINI, ROCCO A, FORNACA, STEVEN W, PETACH, MICHAEL B, SHIELDS, HENRY, MICHAELIAN, MARK E, MCGREGOR, ROY D
Year of Publication 04.11.2009
Get full text
Year of Publication 04.11.2009
Patent
Erosion reduction for EUV laser produced plasma target sources
ORSINI, ROCCO A, FORNACA, STEVEN W, PETACH, MICHAEL B, SHIELDS, HENRY, MICHAELIAN, MARK E, MCGREGOR, ROY D
Year of Publication 12.08.2009
Get full text
Year of Publication 12.08.2009
Patent