Ultra-low NMOS contact resistivity using a novel plasma-based DSS implant and laser anneal for post 7 nm nodes
Ni, C.-N, Rao, K. V., Khaja, F., Sharma, S., Tang, S., Chen, J. J., Hollar, K. E., Breil, N., Li, X., Jin, M., Lazik, C., Lee, J., Maynard, H., Variam, N., Mayur, A. J., Kim, S., Chung, H., Chudzik, M., Hung, R., Yoshida, N., Kim, N.
Published in 2016 IEEE Symposium on VLSI Technology (01.06.2016)
Published in 2016 IEEE Symposium on VLSI Technology (01.06.2016)
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Conference Proceeding
Infrared observation of transverse and longitudinal polar optical modes of semiconductor films: Normal and oblique incidence
Sciacca, MD, Mayur, AJ, Oh, E, Ramdas, AK, Rodriguez, S, Furdyna, JK, Melloch, MR, Beetz, CP, Yoo, WS
Published in Physical review. B, Condensed matter (15.03.1995)
Published in Physical review. B, Condensed matter (15.03.1995)
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Journal Article
Optical properties of Mg-based II-VI ternaries and quaternaries: Cd1-xMgxTe and Cd1-x-yMgxMnyTe
Oh, E, Parks, C, Miotkowski, I, I, Sciacca, MD, Mayur, AJ, Ramdas, AK
Published in Physical review. B, Condensed matter (15.11.1993)
Published in Physical review. B, Condensed matter (15.11.1993)
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Journal Article
Infrared observation of longitudinal optical modes in MBE-grown polar semiconductor films
SCIACCA, M. D, MAYUR, A. J, EUNSOON OH, RAMDAS, A. K, RODRIGUEZ, S
Published in Solid state communications (01.12.1993)
Published in Solid state communications (01.12.1993)
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Journal Article
Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation
Yu, H., Schaekers, M., Hikavyy, A., Rosseel, E., Peter, A., Hollar, K., Khaja, F. A., Aderhold, W., Date, L., Mayur, A. J., Lee, J.-G, Shin, K. M., Douhard, B., Chew, S. A., Demuynck, S., Kubicek, S., Kim, D., Mocuta, A., Barla, K., Horiguchi, N., Collaert, N., Thean, A. V.-Y, De Meyer, K.
Published in 2016 IEEE Symposium on VLSI Technology (01.06.2016)
Published in 2016 IEEE Symposium on VLSI Technology (01.06.2016)
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Conference Proceeding
Evidence for correlated hole distribution in neutron-transmutation-doped isotopically controlled germanium
Itoh, KM, Muto, J, Walukiewicz, W, Beeman, JW, Haller, EE, Kim, H, Mayur, AJ, Sciacca, MD, Ramdas, AK, Buczko, R, Farmer, JW, Ozhogin, VI, VI
Published in Physical review. B, Condensed matter (15.03.1996)
Published in Physical review. B, Condensed matter (15.03.1996)
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Journal Article
Fine structure of the asymmetric stretching vibration of dispersed oxygen in monoisotopic germanium
Mayur, AJ, Sciacca, MD, Udo, MK, Ramdas, AK, Itoh, K, Wolk, J, Haller, EE
Published in Physical review. B, Condensed matter (15.06.1994)
Published in Physical review. B, Condensed matter (15.06.1994)
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Journal Article
Sub-10−9 Ω·cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation
Everaert, J-L, Schaekers, M., Yu, H., Wang, L-L, Hikavyy, A., Date, L., del Agua Borniquel, J., Hollar, K., Khaja, F. A., Aderhold, W., Mayur, A. J., Lee, J. Y., van Meer, H., Jiang, Y-L, De Meyer, K., Mocuta, D., Horiguchi, N.
Published in 2017 Symposium on VLSI Technology (01.06.2017)
Published in 2017 Symposium on VLSI Technology (01.06.2017)
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Conference Proceeding
Local modes of substitutional transition metal ions in II–VI semiconductors
Mayur, A.J., Sciacca, M.Dean, Miotkowski, I., Rocca, G.C.La, Ramdas, A.K., Rodriguez, S.
Published in Solid state communications (01.09.1994)
Published in Solid state communications (01.09.1994)
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Journal Article
Host-isotope fine structure of local and gap modes of substitutional impurities in zinc-blende and wurtzite II-VI semiconductors
Sciacca, MD, Mayur, AJ, Kim, H, Miotkowski, I, I, Ramdas, AK, Rodriguez, S
Published in Physical review. B, Condensed matter (15.05.1996)
Published in Physical review. B, Condensed matter (15.05.1996)
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Journal Article
Thermal processing for continued scaling of semiconductor devices
Sharma, S., Aderhold, W., Raman Sharma, K., Mayur, A. J.
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
Published in 2014 20th International Conference on Ion Implantation Technology (IIT) (01.06.2014)
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Conference Proceeding
Comprehensive study of Ga activation in Si, SiGe and Ge with 5 × 10−10 Ω·cm2 contact resistivity achieved on Ga doped Ge using nanosecond laser activation
Lin-Lin Wang, Hao Yu, Schaekers, M., Everaert, J.-L, Franquet, A., Douhard, B., Date, L., del Agua Borniquel, J., Hollar, K., Khaja, F. A., Aderhold, W., Mayur, A. J., Lee, J. Y., van Meer, H., Mocuta, D., Horiguchi, N., Collaert, N., De Meyer, K., Yu-Long Jiang
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
Published in 2017 IEEE International Electron Devices Meeting (IEDM) (01.12.2017)
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Character association and path analysis in kodo millet (Paspalum scrobiculatum L.) with relation to yield and its attributing traits
Dhrumi Dalsaniya1, Arna Das1, Kinal Patel1, Sneha Macwana1, D. J. Parmar2, Mayur Sonagara1, Dipak A. Patel3, Vikas Pali4
Published in Electronic journal of plant breeding (01.06.2023)
Published in Electronic journal of plant breeding (01.06.2023)
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Journal Article
Silicide yield improvement with NiPtSi formation by laser anneal for advanced low power platform CMOS technology
Ortolland, C., Rosseel, E., Horiguchi, N., Kerner, C., Mertens, S., Kittl, J., Verleysen, E., Bender, H., Vandervost, W., Lauwers, A., Absil, P.P., Biesemans, S., Muthukrishnan, S., Srinivasan, S., Mayur, A.J., Schreutelkamp, R., Hoffmann, T.
Published in 2009 IEEE International Electron Devices Meeting (IEDM) (01.12.2009)
Published in 2009 IEEE International Electron Devices Meeting (IEDM) (01.12.2009)
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Conference Proceeding
Evolution of dopants and defects in silicon under various annealing sequences
Mayur, A. J., Li, J. P., Adams, B., Moffatt, S., Ng, B., Moffitt, T., Howells, S., Hunter, A.
Published in 11th International Workshop on Junction Technology (IWJT) (01.06.2011)
Published in 11th International Workshop on Junction Technology (IWJT) (01.06.2011)
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