APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTROPLATING
Graham, Gabriel Hay, Rash, Robert, Berke, Aaron, Chua, Lee Peng, Mayer, Steven T
Year of Publication 01.11.2018
Get full text
Year of Publication 01.11.2018
Patent
Protecting anodes from passivation in alloy plating systems
Chua, Lee Peng, Ponnuswamy, Thomas A, Mayer, Steven T, Porter, David W
Year of Publication 23.10.2018
Get full text
Year of Publication 23.10.2018
Patent
APPARATUS AND METHOD FOR ELECTRODEPOSITION OF METALS WITH THE USE OF AN IONICALLY RESISTIVE IONICALLY PERMEABLE ELEMENT HAVING SPATIALLY TAILORED RESISTIVITY
Rash, Robert, Kagajwala, Burhanuddin, Buckalew, Bryan L, Berke, Aaron, Chua, Lee Peng, Mayer, Steven T
Year of Publication 04.10.2018
Get full text
Year of Publication 04.10.2018
Patent
ELECTROLYTE DELIVERY AND GENERATION EQUIPMENT
Abraham, Richard G, Kearns, Gregory J, Mayer, Steven T, Ossowski, Lawrence
Year of Publication 27.09.2018
Get full text
Year of Publication 27.09.2018
Patent
INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER STICKING
MAYER, STEVEN T, KUMAR, SANTOSH, BERKE, AARON, RASH, ROBERT, CHUA, LEE PENG
Year of Publication 01.07.2023
Get full text
Year of Publication 01.07.2023
Patent
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
Rash, Robert, Kumar, Santosh, Berke, Aaron, Chua, Lee Peng, Mayer, Steven T
Year of Publication 21.08.2018
Get full text
Year of Publication 21.08.2018
Patent
Multibath plating of a single metal
SIGAMANI, NIRMAL SHANKAR, MAYER, STEVEN T, PONNUSWAMY, THOMAS ANAND, BUCKALEW, BRYAN L, THORKELSSON, KARI
Year of Publication 21.05.2023
Get full text
Year of Publication 21.05.2023
Patent
Electrooxidized metal removal with particle contamination mitigation in semiconductor processing
BUCKALEW BRYAN L, MAYER STEVEN T, BANIK STEPHEN J II, THORKELSSON KARI
Year of Publication 16.05.2023
Get full text
Year of Publication 16.05.2023
Patent
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
Rash, Robert, Kagajwala, Burhanuddin, Buckalew, Bryan L, Berke, Aaron, Chua, Lee Peng, Mayer, Steven T
Year of Publication 03.07.2018
Get full text
Year of Publication 03.07.2018
Patent
Apparatus and method for modulating azimuthal uniformity in electroplating
Graham, Gabriel Hay, Rash, Robert, Berke, Aaron, Chua, Lee Peng, Mayer, Steven T
Year of Publication 05.06.2018
Get full text
Year of Publication 05.06.2018
Patent
TSV BATH EVALUATION USING FIELD VERSUS FEATURE CONTRAST
PORTER, David W, BROGAN, Lee, FU, Haiying, RICHARDSON, Joseph, MAYER, Steven T, THORUM, Matthew
Year of Publication 27.04.2018
Get full text
Year of Publication 27.04.2018
Patent