A 0.13 /spl mu/m high-performance SOI logic technology with embedded DRAM for system-on-a-chip application
Ho, H.L., Steigerwalt, M.D., Walsh, B.L., Doney, T.L., Wildrick, D., McFarland, P.A., Benedict, J., Bard, K.A., Pendleton, D., Lee, J.D., Maurer, S.L., Corrow, B., Sadana, D.K.
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
Published in International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) (2001)
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