Multilayer high-k gate dielectric for a high performance logic transistor
Lin, Chia-Ching, Merrill, Devin, Mattson, Eric Charles, Metz, Matthew V, Penumatcha, Ashish Verma, Haratipour, Nazila, Chang, Sou-Chi, Shivaraman, Shriram, Loh, Owen, Sung, Seung Hoon, Avci, Uygar E, Young, Ian A, Kavalieros, Jack T, Tung, I-Cheng
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
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MULTILAYER HIGH-K GATE DIELECTRIC FOR A HIGH PERFORMANCE LOGIC TRANSISTOR
SUNG, Seung Hoon, TUNG, I-Cheng, HARATIPOUR, Nazila, MERRILL, Devin, CHANG, Sou-Chi, AVCI, Uygar E, SHIVARAMAN, Shriram, KAVALIEROS, Jack T, LOH, Owen, LIN, Chia-Ching, YOUNG, Ian A, METZ, Matthew V, PENUMATCHA, Ashish Verma, MATTSON, Eric Charles
Year of Publication 03.06.2021
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Year of Publication 03.06.2021
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HALOGEN TREATMENT FOR NMOS CONTACT RESISTANCE IMPROVEMENT
KAVALIEROS JACK T, CHOUKSEY SIDDHARTH, HARATIPOUR NAZILA, METZ MATTHEW V, CLENDENNING SCOTT B, DEWEY GILBERT, LU MINHUI, JHA JITENDRA KUMAR, MATTSON ERIC CHARLES
Year of Publication 28.12.2021
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Year of Publication 28.12.2021
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