Improvement in gate LWR with plasma curing of ArF photoresists
Ando, A., Matsui, E., Matsuzawa, N.N., Yamaguchi, Y., Kugimiya, K., Yoshida, M., Salam, K.M.A., Kusakabe, T., Tatsumi, T.
Published in Thin solid films (23.04.2007)
Published in Thin solid films (23.04.2007)
Get full text
Journal Article
Conference Proceeding
Time-Dependent Density Functional Theory Calculations of Photoabsorption of Fluorinated Cyclic Molecules in the Vacuum Ultraviolet Region
Dixon, D.A., Matsuzawa, N.N., Ishitani, A., Uda, T.
Published in Physica status solidi. B. Basic research (01.07.2001)
Published in Physica status solidi. B. Basic research (01.07.2001)
Get full text
Journal Article
Conference Proceeding
Gold-nanoparticle-assisted oligonucleotide immobilisation for improved DNA detection
Minard-Basquin, C, Kügler, R, Matsuzawa, N N, Yasuda, A
Published in IEE proceedings. Nanobiotechnology (01.04.2005)
Published in IEE proceedings. Nanobiotechnology (01.04.2005)
Get more information
Journal Article
Theoretical estimation of photo-absorption of resist molecules in the EUV and VUV region
Matsuzawa, N.N., Mori, S., Oizumi, H., Yano, E., Okazaki, S., Ishitani, A.
Published in Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference (1999)
Published in Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference (1999)
Get full text
Conference Proceeding