기판 처리 시스템들에서의 기판 지지부들을 위한 기판 위치 교정
RAVI JALLEPALLY, TSAI CHENG HSIUNG, MATSUSHITA TOMOHARU, KAMATH ARAVIND, TAKAHAMA HIROYUKI
Year of Publication 01.07.2024
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Year of Publication 01.07.2024
Patent
Effect of Soaking in Solvents on Molecular Orientation of Rubbed Polyimide Film
Hirosawa, Ichiro, Matsushita, Tomoharu, Miyairi, Hiroshi, Saito, Susumu
Published in Japanese Journal of Applied Physics (01.05.1999)
Published in Japanese Journal of Applied Physics (01.05.1999)
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Journal Article
기판 프로세싱 시스템들에서의 기판 지지부들에 대한 기판 포지션 교정
RAVI JALLEPALLY, TSAI CHENG HSIUNG, MATSUSHITA TOMOHARU, KAMATH ARAVIND, TAKAHAMA HIROYUKI
Year of Publication 25.09.2019
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Year of Publication 25.09.2019
Patent
개선된 RF 리턴을 갖는 기판 지지부
RAVI JALLEPALLY, TSAI CHENG HSIUNG, CHANG YU, MATSUSHITA TOMOHARU, KAMATH ARAVIND MIYAR
Year of Publication 23.10.2017
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Year of Publication 23.10.2017
Patent
다수의 가열 구역들을 갖는 기판 지지부
RAVI JALLEPALLY, TSAI CHENG HSIUNG, MATSUSHITA TOMOHARU, YUAN XIAOXIONG, KAMATH ARAVIND, KOPPA MANJUNATHA
Year of Publication 06.09.2017
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Year of Publication 06.09.2017
Patent
SUBSTRATE SUPPORT WITH MORE UNIFORM EDGE PURGE
RAVI JALLEPALLY, MATSUSHITA TOMOHARU, TSAI CHENG HSIUNG MATTHEW, YUAN XIAOXIONG, KAMATH ARAVIND MIYAR, KOPPA MANJUNATHA
Year of Publication 15.03.2017
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Year of Publication 15.03.2017
Patent
The Relationship between Pretilt Angle of Liquid Crystal and Optical Anisotropy of Alignment Film
Hirosawa, Ichiro, Miyairi, Hiroshi, Matsushita, Tomoharu, Satio, Susumu
Published in Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals (01.08.2001)
Published in Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals (01.08.2001)
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Journal Article
Conference Proceeding
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE PROCESSING SYSTEMS
TAKAHAMA, Hiroyuki, KAMATH, Aravind, TSAI, Cheng-Hsiung, RAVI, Jallepally, MATSUSHITA, Tomoharu
Year of Publication 25.05.2023
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Year of Publication 25.05.2023
Patent
MULTI-CHANNEL INFORMATION PROCESSOR
MATSUSHITA, TOMOHARU, AZAMI, TOSHIHIRO, YANO, KATSUTOSHI, YASUMOTO, TOMONORI
Year of Publication 03.10.2002
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Year of Publication 03.10.2002
Patent
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE PROCESSING SYSTEMS
TAKAHAMA, Hiroyuki, KAMATH, Aravind, TSAI, Cheng-Hsiung, RAVI, Jallepally, MATSUSHITA, Tomoharu
Year of Publication 31.03.2022
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Year of Publication 31.03.2022
Patent
Substrate position calibration for substrate supports in substrate processing systems
Ravi, Jallepally, Takahama, Hiroyuki, Matsushita, Tomoharu, Kamath, Aravind, Tsai, Cheng-Hsiung
Year of Publication 14.12.2021
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Year of Publication 14.12.2021
Patent
Substrate position calibration for substrate supports in substrate processing systems
MATSUSHITA, TOMOHARU, KAMATH, ARAVIND, TAKAHAMA, HIROYUKI, RAVI, JALLEPALLY, TSAI, CHENG-HSIUNG
Year of Publication 01.10.2023
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Year of Publication 01.10.2023
Patent
Substrate support with improved RF return
Kamath, Aravind Miyar, Ravi, Jallepally, Matsushita, Tomoharu, Chang, Yu, Tsai, Cheng-Hsiung
Year of Publication 20.11.2018
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Year of Publication 20.11.2018
Patent