Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device
Lalinský, T., Hudek, P., Vanko, G., Dzuba, J., Kutiš, V., Srnánek, R., Choleva, P., Vallo, M., Držík, M., Matay, L., Kostič, I.
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Conference Proceeding
Fabrication process development for a high sensitive electrochemical IDA sensor
Partel, S., Mayer, M., Hudek, P., Dinçer, C., Kieninger, J., Urban, G.A., Motzek, K., Matay, L.
Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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GaAs based micromachined thermal converter for gas sensors
Lalinský, T., Držík, M., Jakovenko, J., Vanko, G., Mozolová, Ž., Haščík, Š., Chlpík, J., Hotový, I., Řeháček, V., Kostič, I., Matay, L., Husák, M.
Published in Sensors and actuators. A. Physical. (10.03.2008)
Published in Sensors and actuators. A. Physical. (10.03.2008)
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Properties of nano-scaled disperse media investigated by refractometric measurements
Sarov, Y., Capek, I., Janíc˘ková, S., Kostic˘, I., Konec˘níková, A., Matay, L., Sarova, V.
Published in Vacuum (05.11.2004)
Published in Vacuum (05.11.2004)
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Advanced patterning techniques for nanodevice fabrication
KOSTIC, I, ANDOK, R, BARAK, V, CAPLOVIC, I, KONECNIKOVA, A, MATAY, L, HRKUT, P, RITOMSKY, A
Published in Journal of materials science. Materials in electronics (01.10.2003)
Published in Journal of materials science. Materials in electronics (01.10.2003)
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Nanostructuring of Mo/Si multilayers by means of reactive ion etching using a three-level mask
Dreeskornfeld, L., Haindl, G., Kleineberg, U., Heinzmann, U., Shi, F., Volland, B., Rangelow, I.W., Majkova, E., Luby, S., Kostic, Matay, L., Hrkut, P., Hudek, P., Lee, Hsin-Yi
Published in Thin solid films (30.06.2004)
Published in Thin solid films (30.06.2004)
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Studies of dielectric characteristics of spin-coated polyimide films
Matay, L.
Published in The Fourth International Conference on Advanced Semiconductor Devices and Microsystem (2002)
Published in The Fourth International Conference on Advanced Semiconductor Devices and Microsystem (2002)
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Conference Proceeding
T-shaped gates for heterostructure field effect transistors
Lalinský, T., Škriniarová, J., Kostič, I., Hart van der, A., Hrkút, P., Haščı́k, Š., Matay, L., Mozolová, Ž., Kordoš, P.
Published in Vacuum (14.05.2001)
Published in Vacuum (14.05.2001)
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Conference Proceeding
Polyimide-fixed GaAs Island structure prepared using plasma etching technique
Haščík, Š., Lalinský, T., Krnáč, M., Mozolová, Ž., Matay, L., Hrkút, P., Hotový, I.
Published in Czechoslovak journal of physics (01.01.2004)
Published in Czechoslovak journal of physics (01.01.2004)
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Assembling of nanoparticle arrays using microelectromagnetic matrix
Chitu, L., Luby, S., Majkova, E., Hrkut, P., Matay, L., Kostic, I., Satka, A.
Published in Superlattices and microstructures (01.10.2008)
Published in Superlattices and microstructures (01.10.2008)
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Mechanically fixed and thermally insulated micromechanical structures for GaAs heterostructure based MEMS devices
Lalinsky´, T, Haš ík, S, Mozolová, ., Burian, E, Krná, M, Tomáška, M, Škriniarová, J, Drz ík, M, Kostic, I, Matay, L
Published in Microelectronics international (01.04.2003)
Published in Microelectronics international (01.04.2003)
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Material optimization of the alignment marks for the EBDW lithography
Matay, L, Andok, R, Barák, V, Ritomský, A, Konečniková, A, Kostič, I, Partel, S, Hudek, P
Published in The Eighth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2010)
Published in The Eighth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2010)
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Conference Proceeding
Patterning of nanometer structures by using direct-write e-beam lithography for the sensor development
Ďurina, P, Štefečka, M, Roch, T, Noskovič, J, Trgala, M, Pidík, A, Kostič, I, Konečniková, A, Matay, L, Kúš, P, Plecenik, P
Published in The Eighth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2010)
Published in The Eighth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2010)
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Conference Proceeding
T-shaped gate based on poly Si/polyimide supported layers
Lalinsky, T., Hrkut, P., Matay, L., Kostic, I., Hascik, S., Hudek, P.
Published in ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) (1998)
Published in ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) (1998)
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Conference Proceeding
The influence of patterned substrates on structure and magnetism of Au/Co multilayers
Angelakeris, M., Papaioannou, E.Th, Valassiades, O., Vouroutzis, N., Tsiaoussis, I., Mueller, Ch, Fumagalli, P., Kostic, I., Matay, L., Flevaris, N.K.
Published in Journal of magnetism and magnetic materials (01.05.2004)
Published in Journal of magnetism and magnetic materials (01.05.2004)
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Journal Article
Estimation of exposure parameters of chosen e-beam resists using variable shaped e-beam pattern generator
Andok, R., Matay, L., Kostic, I., Bencurova, A., Nemec, P., Konecnikova, A., Ritomsky, A.
Published in The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems (01.11.2012)
Published in The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems (01.11.2012)
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Conference Proceeding
New progressive method suitable for the exposure optimization of large and complex defect-free chips direct written by ZBA 21 e-beam tool
Matay, L., Andok, R., Barak, V., Konecnikova, A., Kostic, I., Partel, S., Hudek, P.
Published in 2008 International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2008)
Published in 2008 International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2008)
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Conference Proceeding
Microelectromagnetic matrix for local assembling of magnetic nanoparticles
Luby, S., Chitu, L., Majkova, E., Senderak, R., Kosticb, I., Hrkut, P., Matay, L., Hascik, S., Lalinsky, T., Capek, L., Satka, A.
Published in 2006 International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2006)
Published in 2006 International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2006)
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Conference Proceeding
MICROMECHANICAL THERMAL CONVERTER DEVICE BASED ON POLYIMIDE-FIXED ISLAND STRUCTURE
LALINSKÝ, T., KRNÁČ, M., HAŠČÍK, Š., MOZOLOVÁ, Ž., MATAY, L., KOSTIČ, I., HRKÚT, P., JAKOVENKO, J., HUSÁK, M.
Published in International journal of computational engineering science (IJCES) (01.09.2003)
Published in International journal of computational engineering science (IJCES) (01.09.2003)
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