Search Results - "Masusaki, Hiroshi" :: K.UTB vyhledávací portál

Quantum Chemical Mechanism of Heterogeneous Reaction between Trichlorosilane and Adsorbed Water

by Makita, Toshiki, Nakamura, Koichi, Tachibana, Akitomo, Masusaki, Hiroshi, Matsumoto, Koh, Ishihara, Yoshio
Published in Japanese Journal of Applied Physics (2003)

Get full text

Journal Article

Loading…

Sensitivity Enhancement for Acetylene Detection at 1.5 µm by Use of a High-Finesse Optical Cavity

by Okazawa, Rika, Kuze, Hiroaki, Masusaki, Hiroshi, Takeuchi, Nobuo
Published in Japanese Journal of Applied Physics (01.08.1999)

Get full text

Journal Article

Loading…

Hydrogen Chloride Gas Monitoring at 1.74 µm with InGaAs/InGaAsP Strained Quantum Well Laser

by Ubukata, Akinori, Dong, Jie, Masusaki, Hiroshi, Satoh, Takayuki, Matsumoto, Koh
Published in Japanese Journal of Applied Physics (01.05.1998)

Get full text

Journal Article

Loading…

Determination of trace moisture in gases by diode-laser multi-pass absorption spectroscopy

by Wu, Shang-Qian, KIMISHIMA, Tetsuya, MASUSAKI, Hiroshi, KUZE, Hiroaki, TAKEUCHI, Nobuo
Published in BUNSEKI KAGAKU (2000)

Get full text

Journal Article

Loading…

半導体レーザー多重反射吸収分光法によるガス中微量水分の定量

by 呉, 尚謙, 君島, 哲也, 増崎, 宏, 久世, 宏明, 竹内, 延夫
Published in 分析化学 (2000)

Get full text

Journal Article

Loading…

SPECTROPHOTOMETRY METHOD OF GAS BY LASER RAY

by MATSUMOTO KOU, DONGJIE, MASUSAKI HIROSHI, SUZUKI KATSUMASA
Year of Publication 02.07.2001

Get full text

Patent

Loading…

SPECTROSCOPIC ANALYSIS METHOD OF ISOTOPE USING SEMICONDUCTOR LASER

by MATSUMOTO KOU, DONGJIE, MASUSAKI HIROSHI, SUZUKI KATSUMASA
Year of Publication 15.06.2001

Get full text

Patent

Loading…

Semiconductor Manufacturing Method and Semiconductor Manufacturing Apparatus

by MASUSAKI HIROSHI, HASEGAWA HIROYUKI, YAMAOKA TOMONORI, ISHIHARA YOSHIO
Year of Publication 07.09.2001

Get full text

Patent

Loading…

MEASURING CELL FOR SPECTRAL ANALYSIS

by MATSUMOTO, KOH, SATOH, TAKAYUKI, MASUSAKI, HIROSHI, SUZUKI, KATSUMASA
Year of Publication 08.07.1999

Get full text

Patent

Loading…

INFRARED SPECTROCHEMICAL GAS ANALYSIS AND APPARATUS USED FOR THE SAME

by MATSUMOTO, KOH, WUM SHANG-QIAN, MASUSAKI, HIROSHI, ISHIHARA, YOSHIO
Year of Publication 15.05.1999

Get full text

Patent

Loading…

Quantitative Analysis of Trace Moisture in N 2 and NH 3 Gases with Dual-Cell Near-Infrared Diode Laser Absorption Spectroscopy

by Wu, Shang-Qian, Morishita, Jun-ichi, Masusaki, Hiroshi, Kimishima, Tetsuya
Published in Analytical chemistry (Washington) (01.08.1998)

Get full text

Journal Article

Loading…

METHOD FOR DETERMINING MAINTENANCE TIME FOR SEMICONDUCTOR MANUFACTURING APPARATUS

by SATOU TAKAYUKI, MASUSAKI HIROSHI, HASEGAWA HIROYUKI, YAMAOKA TOMONORI, ISHIHARA YOSHIO, SUZUKI KATSUMASA, TOKUNAGA HIROKI
Year of Publication 19.09.2002

Get full text

Patent

Loading…

MOISTURE MONITORING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING SAME

by SATOU TAKAYUKI, MASUSAKI HIROSHI, HASEGAWA HIROYUKI, YAMAOKA TOMONORI, ISHIHARA YOSHIO, SUZUKI KATSUMASA, TOKUNAGA HIROKI
Year of Publication 19.09.2002

Get full text

Patent

Loading…

PURGING METHOD OF CVD APPARATUS

by SATOU TAKAYUKI, MASUSAKI HIROSHI, HASEGAWA HIROYUKI, YAMAOKA TOMONORI, ISHIHARA YOSHIO, SUZUKI KATSUMASA, TOKUNAGA HIROKI
Year of Publication 19.09.2002

Get full text

Patent

Loading…

CVD APPARATUS PURGING METHOD THEREOF METHOD FOR DETERMINING MAINTENANCE TIME FOR SEMICONDUCTOR MANUFACTURING APPARATUS MOISTURE MONITORING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS HAVING SAME

by SATOU TAKAYUKI, MASUSAKI HIROSHI, HASEGAWA HIROYUKI, YAMAOKA TOMONORI, ISHIHARA YOSHIO, SUZUKI KATSUMASA, TOKUNAGA HIROKI
Year of Publication 16.04.2001

Get full text

Patent

Loading…

Quantitative Analysis of Trace Moisture in N2 and NH3 Gases with Dual-Cell Near-Infrared Diode Laser Absorption Spectroscopy

by Wu, Shang-Qian, Morishita, Jun-ichi, Masusaki, Hiroshi, Kimishima, Tetsuya
Published in Analytical chemistry (Washington) (01.08.1998)

Get full text

Journal Article

Loading…

INFRARED SPECTROCHEMICAL GAS ANALYSIS AND APPARATUS USED FOR THE SAME

by MATSUMOTO, KOH, MASUSAKI, HIROSHI, WU, SHANG-QIAN, ISHIHARA, YOSHIO
Year of Publication 05.10.1995

Get full text

Patent

Loading…

Absorption Spectrometry of Trace Moisture in Ammonia Gas with a 1371 nm Distributed-Feedback Diode Laser

by Wu, Shang-Qian, Masusaki, Hiroshi, Kimishima, Tetsuya, Kuze, Hiroaki, Takeuchi, Nobuo
Published in Japanese Journal of Applied Physics (01.08.1999)

Get full text

Journal Article