Sub-Nanometer Resolution Positioning Device Driven by New Type of Linear Motor with Linear Ball Guideways – Considering Time Lag of Electric Control System
Tanaka, Toshiharu, Otsuka, Jiro, Masuda, Ikuro, Aoyama, Yasuaki, Inagaki, Asuka
Published in International journal of automation technology (05.11.2011)
Published in International journal of automation technology (05.11.2011)
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Journal Article
Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion Ball Guide Ways
Otsuka, Jiro, Tanaka, Toshiharu, Masuda, Ikuro
Published in International journal of automation technology (05.05.2009)
Published in International journal of automation technology (05.05.2009)
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Journal Article
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS COMPOSITE ELECTRONIC DEVICE
IWAMURA, MASAHIRO, NAKANO, TETSUO, MASUDA, IKURO, TANAKA, SHIGEYA, YAMAUCHI, TATSUMI
Year of Publication 15.04.1998
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Year of Publication 15.04.1998
Patent
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
IKEDA MITSUHIRO, KUBOKI SHIGEO, TAKANO AKIHIKO, NASHIO YOJI, MASUDA IKURO
Year of Publication 23.07.1986
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Year of Publication 23.07.1986
Patent
Perspective on BiCMOS VLSIs
Kubo, M., Masuda, I., Miyata, K., Ogiue, K.
Published in IEEE journal of solid-state circuits (01.02.1988)
Published in IEEE journal of solid-state circuits (01.02.1988)
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