Semantic modeling for smart manufacturing: towards a data alignment through knowledge formalization for semiconductor wafer fabrication
Maslov, Giulia, Yugma, Claude, Vialletelle, Philippe
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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