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Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table
by
Bargiel, S.
,
Rabenorosoa, K.
,
Mascaro
,
J
-
P
.
,
Clévy, C.
,
Gorecki, C.
,
Lutz, P.
Published in
Procedia engineering
(2010)
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chemistry
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chemistry
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chemistry, analytical
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engineering
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engineering, electrical & electronic
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hybrid integration
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materials science
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