IMPHEAT-II, a novel high temperature ion implanter for mass production of SiC power devices
Kuwata, Yusuke, Shiojiri, Shiro, Nakanishi, Akihito, Inoue, Shinsuke, Adachi, Masakazu, Hirai, Yuya, Ueno, Koyu, Wang, Jian, Uji, Nobuhiro, Nagamori, Hideo, Masa, Johnny, Shirakawa, Hiroshi, Yuasa, Kensuke, Nakazawa, Yoshiyuki, Goto, Ryosuke, Hahto, Sami, Sacco, George, Tamura, Shigehisa, Orihira, Koichi, Onoda, Masatoshi, Hayashi, Yoshinobu, Sakamoto, Takashi, Zhao, Weijiang
Published in MRS advances (01.12.2022)
Published in MRS advances (01.12.2022)
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