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Published in Journal of controlled release (01.10.2019)
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Published in Journal of drug targeting (07.02.2022)
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Year of Publication 25.01.2007
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Year of Publication 25.01.2007
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Photomask Blank Photomask and Method of Manufacture
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Year of Publication 11.09.2002
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Phase Shift Mask Blank Phase Shift Mask and Methods of Manufacture
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Year of Publication 26.01.2002
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Year of Publication 26.01.2002
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Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof
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Year of Publication 24.06.2015
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Year of Publication 24.06.2015
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Photomask blank, photomask and fabrication method thereof
HARAGUCHI TAKASHI, KUBOTA HIROSHI, KINASE YOSHINORI, IWAKATA MASAHIDE, MARUYAMA TAMOTSU, YOSHIKAWA HIROKI, OKAZAKI SATOSHI, FUKUSHIMA YUICHI, SAGA TADASHI
Year of Publication 22.04.2015
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Year of Publication 22.04.2015
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Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof
Inazuki, Yukio, Yoshikawa, Hiroki, Maruyama, Tamotsu, Okazaki, Satoshi
Year of Publication 24.11.2009
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Year of Publication 24.11.2009
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