Measuring Young's modulus of polysilicon via cantilever microbeam arrays
Kehrberg, Steven, Dorwarth, Markus, Gunther, Sebastian, Markisch, Steffen, Geckeler, Carsten, Mehner, Jan
Published in 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01.04.2014)
Published in 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01.04.2014)
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