Process Control Monitoring Devices for CMOS-MEMS Monolithic PMUT Technology
Marigo, Eloi, Kumaaran, Siva, Safwan, Mohd, Wong, Goon Weng
Published in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (21.01.2024)
Published in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (21.01.2024)
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Conference Proceeding
A 230 MHz CMOS-MEMS bulk acoustic wave resonator
MARIGO FERRER, Eloi, MUNOZ-GAMARRA, J. L, GINER, J, URANGA, A, BARNIOL, N
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Conference Proceeding
Design of a MEMS-Based Oscillator Using 180nm CMOS Technology
Roy, Sukanta, Ramiah, Harikrishnan, Reza, Ahmed Wasif, Lim, Chee Cheow, Ferrer, Eloi Marigo
Published in PloS one (08.07.2016)
Published in PloS one (08.07.2016)
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Journal Article
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction
Marigó, Eloi, Sansa, Marc, Pérez-Murano, Francesc, Uranga, Arantxa, Barniol, Núria
Published in Sensors (Basel, Switzerland) (14.07.2015)
Published in Sensors (Basel, Switzerland) (14.07.2015)
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Journal Article
Nonlinear behavior of the capacitively coupled NEMS resonator operating close to the nonlinear regime cancellation
Sobreviela, Guillermo, Vidal-Alvarez, Gabriel, Riverola, Martí, Uranga, Arantxa, Torres, Francesc, Marigó, Eloi, Soundara-Pandian, Mohanraj, Barniol, Núria
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
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Conference Proceeding
Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator
Giner, Joan, Uranga, Arantxa, Marigò, Eloi, Muñoz-Gamarra, Jose Luis, Colinet, Eric, Barniol, Nuria, Arcamone, Julien
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Journal Article
Conference Proceeding
Squared PMUT with Enhanced Pressure Sensitivities
Eyglis Ledesma, Iván Zamora, Francesc Torres, Arantxa Uranga, Vassil Tzanov, Nuria Barniol, Eloi Marigó, Mohan Soundara-Pandian
Published in Proceedings (01.11.2018)
Published in Proceedings (01.11.2018)
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Journal Article
A 230MHz CMOS-MEMS bulk acoustic wave resonator
Ferrer, Eloi Marigó, Muñoz-Gamarra, J.L., Giner, J., Uranga, A., Barniol, N.
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Journal Article
Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes
Aslam, Muhammad Zubair, Jeoti, Varun, Karuppanan, Saravanan, Pandian, Mohanraj Soundara, Ferrer, Eloi Marigo, Suresh, Kasyap
Published in Sensors and actuators. A. Physical. (01.10.2020)
Published in Sensors and actuators. A. Physical. (01.10.2020)
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Journal Article
Multi-Frequency Imaging with a CMOS Compatible Scandium Doped Aluminum Nitride PMUT Array
Billen, Margo, Gao, Hang, Tabruyn, Dries, Marigo, Eloi, Soundara-Pandian, Mohan, Helin, Philippe, Rochus, Veronique
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
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Conference Proceeding
Evaluating Film Assisted Molding Packaging for Peizoelectric Micromachined Ultrasonic Transducers
Tan, Teng Hwang, Soundara-Pandian, Mohanraj, Shazwani, Nor, Marigo, Eloi, Raj, Regis Arul, Subramaniam, Manimaran
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
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Conference Proceeding
Manufacturability of Highly Densed Arrays of SC 20% Doped ALN Monolithic PMUT
Marigo, Eloi, Azuan, Muhammad Nur, Amiera, Anis, Annie, Loh, Shazwani, Nor, Fei, Chan Buan, Soundara-Pandian, Mohanraj
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
Published in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (25.01.2021)
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Conference Proceeding
AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates
Ledesma, Eyglis, Zamora, Ivan, Torres, Francesc, Uranga, Arantxa, Tzanov, Vassil, Barniol, Nuria, Marigo, Eloi, Soundara-Pandian, Mohan
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
ALN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency
Ledesma, Eyglis, Tzanov, Vassil, Zamora, Ivan, Torres, Francesc, Uranga, Arantxa, Barniol, Nuria, Marigo, Eloi, Soundara-Pandian, Mohan
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging
Ferrer, Eloi Marigo, Pandian, Mohanraj Soundara, Uranga, Arantxa, Barniol, Nuria, Tay, Wee Song, Fei, Chan Buan
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
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Conference Proceeding
Monolithic BAW oscillator with conventional QFN packaging
Marigo, Eloi, Soundara-Pandian, Mohanraj, Bin, Jazril, Din, Jamil, Roslan, Nor Shazwani Binti, Fawzy, Ali, Yasser, Ahmed, Atef, Mohamed, Ahmed, Ayman
Published in 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC) (01.04.2019)
Published in 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC) (01.04.2019)
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Conference Proceeding
A 10-bit linearity current-controlled ring oscillator with rolling regulation for smart sensing
Dei, Michele, Sacristan, Jordi, Marigo, Eloi, Soundara, Mohanraj, Teres, Lluis, Serra-Graells, Francisco
Published in 2017 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2017)
Published in 2017 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2017)
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Conference Proceeding
Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si
Malik, Aamir F., Jeoti, Varun, Fawzy, Mohamad, Iqbal, Asif, Aslam, Zubair, Pandian, Mohanraj Soundara, Marigo, Eloi
Published in 2016 6th International Conference on Intelligent and Advanced Systems (ICIAS) (01.08.2016)
Published in 2016 6th International Conference on Intelligent and Advanced Systems (ICIAS) (01.08.2016)
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Conference Proceeding