Advanced Low Energy Focused Ion Beam Design Based on Immersion Optics
Rauscher, M, Marianowski, K, Degel, B, Plies, E
Published in Microscopy and microanalysis (01.09.2007)
Published in Microscopy and microanalysis (01.09.2007)
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Journal Article
Limitations to low-voltage focused ion beam operation
Rauscher, Michael, Marianowski, Karin, Degel, Bernhard, Plies, Erich
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding