Fabrication of Phase Change Microstring Resonators via Top Down Lithographic Techniques: Incorporation of VO2/TiO2 Into Conventional Processes
McGee, Ryan, Goswami, Ankur, Bukhari, Syed Asad Manzoor, Zhou, Liang, Shankar, Karthik, Thundat, Thomas
Published in Journal of microelectromechanical systems (01.10.2019)
Published in Journal of microelectromechanical systems (01.10.2019)
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Journal Article
Fabrication of Phase Change Microstring Resonators via Top Down Lithographic Techniques: Incorporation of VO 2 /TiO 2 Into Conventional Processes
McGee, Ryan, Goswami, Ankur, Bukhari, Syed Asad Manzoor, Zhou, Liang, Shankar, Karthik, Thundat, Thomas
Published in Journal of microelectromechanical systems (01.10.2019)
Published in Journal of microelectromechanical systems (01.10.2019)
Get full text
Journal Article
Thermomechanical analysis of picograms of polymers using a suspended microchannel cantileverElectronic supplementary information (ESI) available. See DOI: 10.1039/c6ra25455a
Manzoor Bukhari, Syed Asad, Khan, M. Faheem, Goswami, Ankur, McGee, Ryan, Thundat, Thomas
Year of Publication 24.01.2017
Year of Publication 24.01.2017
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Journal Article