Search Results - "Mann, Hans-Juergen" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

IMAGING OPTICAL SYSTEM

IMAGING OPTICAL SYSTEM

by MANN HANS-JUERGEN
Year of Publication 14.01.2016

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Patent

PROJECTION OPTICAL SYSTEM FOR MICROLITHOGRAPHY

PROJECTION OPTICAL SYSTEM FOR MICROLITHOGRAPHY

by MANN HANS-JUERGEN
Year of Publication 06.11.2014

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Patent

IMAGING OPTICS, AND A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY HAVING SUCH AN IMAGING OPTICS

IMAGING OPTICS, AND A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY HAVING SUCH AN IMAGING OPTICS

by MANN HANS JUERGEN, SHAFER DAVID
Year of Publication 21.01.2013

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Patent

MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVING AT LEAST TWO OPERATING STATES

MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVING AT LEAST TWO OPERATING STATES

by MANN HANS JUERGEN, KAISER WINFRIED
Year of Publication 03.06.2011

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Patent

DEVICE FOR MICROLITHOGRAPHIC PROJECTION ILLUMINATION AND DEVICE FOR THE INSPECTION OF A SURFACE OF A SUBSTRATE

DEVICE FOR MICROLITHOGRAPHIC PROJECTION ILLUMINATION AND DEVICE FOR THE INSPECTION OF A SURFACE OF A SUBSTRATE

by SINGER WOLFGANG, MANN HANS JUERGEN
Year of Publication 30.11.2010

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Patent

CATADIOPTRIC PROJECTION OBJECTIVE SYSTEM

CATADIOPTRIC PROJECTION OBJECTIVE SYSTEM

by DODOC AURELIAN, ULRICH WILHELM, EPPLE ALEXANDER, SUZANNE BEDELL, BUENAU RUDOLF VON, WOLFGANG ZIEGLER, MANN HANS-JUERGEN, SHAFER DAVID
Year of Publication 28.12.2016

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Patent

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC EXPOSURE APPARATUS

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC EXPOSURE APPARATUS

by MUELLENDER STEPHAN, MANN HANS JUERGEN, ENKISCH HARTMUT, FREIMANN ROLF
Year of Publication 16.09.2013

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Patent

CATADIOPTRIC PROJECTION OBJECTIVE SYSTEM

CATADIOPTRIC PROJECTION OBJECTIVE SYSTEM

by DODOC AURELIAN, ULRICH WILHELM, EPPLE ALEXANDER, SUZANNE BEDELL, BUENAU RUDOLF VON, WOLFGANG ZIEGLER, MANN HANS-JUERGEN, SHAFER DAVID
Year of Publication 04.02.2016

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Patent

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

by DODOC AURELIAN, ULRICH WILHELM, EPPLE ALEXANDER, SUZANNE BEDELL, BUENAU RUDOLF VON, WOLFGANG ZIEGLER, MANN HANS-JUERGEN, SHAFER DAVID
Year of Publication 02.07.2015

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Patent

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

by DODOC AURELIAN, ULRICH WILHELM, EPPLE ALEXANDER, SUZANNE BEDELL, BUENAU RUDOLF VON, WOLFGANG ZIEGLER, MANN HANS-JUERGEN, SHAFER DAVID
Year of Publication 23.10.2014

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Patent

PROJECTION OBJECTIVE WITH OBSCURATED PUPIL FOR MICROLITHOGRAPHY

PROJECTION OBJECTIVE WITH OBSCURATED PUPIL FOR MICROLITHOGRAPHY

by GRUNER TORALF, DODOC AURELIAN, MANN HANS JUERGEN, KRAEHMER DANIEL
Year of Publication 06.07.2010

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Patent

8- 8-Mirror-microlithography -projection objective

8- 8-Mirror-microlithography -projection objective

by SEITZ GUENTHER, ULRICH WILHELM, MANN HANS-JUERGEN
Year of Publication 26.04.2002

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Patent

6 - - 6 Mirror-microlithography-projection objective

6 - - 6 Mirror-microlithography-projection objective

by DINGER UDO, MUEHLBEYER MICHAEL, MANN HANS-JUERGEN
Year of Publication 08.02.2002

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Patent

Magnifying imaging optical unit and EUV mask inspection system with such an imaging optical unit

Magnifying imaging optical unit and EUV mask inspection system with such an imaging optical unit

by Mann, Hans-Juergen
Year of Publication 10.09.2019

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Patent

IMAGING OPTICAL SYSTEM

IMAGING OPTICAL SYSTEM

by Mann, Hans-Juergen
Year of Publication 24.01.2019

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Patent

Imaging optical system

Imaging optical system

by Mann, Hans-Juergen
Year of Publication 26.06.2018

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Patent

IMAGING OPTICAL SYSTEM

IMAGING OPTICAL SYSTEM

by Mann Hans-Juergen
Year of Publication 25.05.2017

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Patent

Imaging optics and projection exposure installation for microlithography with an imaging optics

Imaging optics and projection exposure installation for microlithography with an imaging optics

by Mann Hans-Juergen
Year of Publication 02.05.2017

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Patent

Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods

Anamorphically imaging projection lens system and related optical systems, projection exposure systems and methods

by Mann Hans-Juergen
Year of Publication 14.02.2017

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Patent

Magnifying imaging optical unit and metrology system including same

Magnifying imaging optical unit and metrology system including same

by Mann Hans-Juergen
Year of Publication 01.11.2016

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Patent

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