by De Araujo, Laryssa Mirelly Carvalho, Manguele, Jacques Junior, Vilquin, Bertrand, Wang, Zhe, Adamo, Carolina, Romeo, Pedro Rojo, Cibert, Christophe, Poullain, Gilles, Domenges, Bernadette, Pierron, Victor, Schlom, Darrell G., Mechin, Laurence
Published in 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (25.08.2021)