Method to chemical-mechanically polish layers made of platin group metals
BEITEL, GERHARD, SAENGER, ANNETTE, MAINKA, GERD, SCHNABEL, RAINER FLORIAN
Year of Publication 11.01.2005
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Year of Publication 11.01.2005
Patent
Method for chemical-mechanical polishing of layers made from metals from the platinum group
MAINKA GERD, SAENGER ANNETTE, BEITEL GERHARD, SCHNABEL RAINER FLORIAN
Year of Publication 15.05.2003
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Year of Publication 15.05.2003
Patent
METHOD FOR CHEMICAL-MECHANICAL POLISHING OF LAYERS MADE FROM METALS FROM THE PLATINUM GROUP
BEITEL, GERHARD, SAENGER, ANNETTE, SCHNABEL, RAINER, FLORIAN, MAINKA, GERD
Year of Publication 04.04.2002
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Year of Publication 04.04.2002
Patent