Failure mechanism analysis and process improvement on time-dependent dielectric breakdown of Cu/ultra-low-k dielectric based on complementary Raman and FTIR spectroscopy study
Wang, Dan Dan, Wang, Wei Lin, Huang, Maggie Yamin, Lek, Alan, Lam, Jeffrey, Mai, Zhi Hong
Published in AIP advances (01.07.2014)
Published in AIP advances (01.07.2014)
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Journal Article
Laser-Scanning Probe Microscope Based Nanoprocessing of Electronics Materials
Lu, Yong-Feng, Hu, Bing, Mai, Zhi-Hong, Wang, Wei-Jie, Chim, Wai-Kin, Chong, Tow-Chong
Published in Japanese Journal of Applied Physics (01.06.2001)
Published in Japanese Journal of Applied Physics (01.06.2001)
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Journal Article
Electromagnetic Calculations of the Near Field of a Tip under Polarized Laser Irradiation
Lu, Yong-Feng, Mai, Zhi-Hong, Chim, Wai-Kin
Published in Japanese Journal of Applied Physics (01.10.1999)
Published in Japanese Journal of Applied Physics (01.10.1999)
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Journal Article
Nano-scale Morphology and Crystallography of Laser-Deposited TiN Thin Films
Wang, Hai-Dan, Lu, Yong-Feng, Mai, Zhi-Hong, Ren, Zhong-Min
Published in Japanese Journal of Applied Physics (2000)
Published in Japanese Journal of Applied Physics (2000)
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Journal Article
Characterization of anti-stiction coatings for MEMS applications
Seetoh, Ian P., Han Wei Teo, Zhi Qiang Mo, Lo, Eddy, Zhi Hong Mai, Lam, Jeffrey
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
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Conference Proceeding
Mechanism of abnormal dual-peak profiles in large tilt-angle ion implantation studied by SRIM analysis
Lei Zhu, Pik Kee Tan, Dandan Wang, Yamin Huang, Lam, Jeffrey, Zhi Hong Mai
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
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Conference Proceeding
A controlled, mechanical method for MEMS decapsulation
Hao Tan, Moyal, Efrat, Huei Hao Yap, Yu Zhe Zhao, Ran He, Yin Zhe Ma, Bing Hai Liu, Chang Qing Chen, Pik Kee Tan, Lam, Jeffrey, Zhi Hong Mai
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
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Conference Proceeding
Uncovered the "hidden real defect" masked by "other anomaly seen" through deep dive FA in wafer fabrication
Teo, Angela, Ng Hui Peng, Ang Ghim Boon, Chen Chang Qing, Xu Nai Yun, Dayanand, N., Tam Yong Seng, Mai Zhi Hong, Lam, Jeffrey
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
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Conference Proceeding
The guided image filtering for speckle reduction in SAR images
Shi, Hao, Chen, Liang, Zhi-hong, Mai, Chen, He, Fu-kun Bi
Published in IET Conference Proceedings (14.10.2015)
Published in IET Conference Proceedings (14.10.2015)
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Conference Proceeding
Electrochemical Nanolithography on Amorphous WO 3 Thin Films Using Scanning Tunneling Microscope in Air
Qiu, Hong, Lu, Yong-Feng, Mai, Zhi-Hong
Published in Japanese Journal of Applied Physics (01.11.2001)
Published in Japanese Journal of Applied Physics (01.11.2001)
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Journal Article
Failure Analysis Methodology on Systematic MIM failure in Wafer Fabrication
Teo, Angela, Boon, Ang Ghim, Peng, Ng Hui, Qing, Chen Chang, Yun, Xu Nai, Dayanand, N., Seng, Tam Yong, Hong, Mai Zhi, Lam, Jeffrey
Published in 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2018)
Published in 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2018)
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Conference Proceeding
Nanostructure Formation on Amorphous WO 3 Thin Films in Air by Scanning Tunneling Microscopy
Qiu, Hong, Lu, Yong-Feng, Mai, Zhi-Hong
Published in Japanese Journal of Applied Physics (01.01.2001)
Published in Japanese Journal of Applied Physics (01.01.2001)
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Journal Article
Si nano-particle characterization by atomic force microscopy and electronic beam techniques
Tan, Hao, Zhu, Jie, Zhao, Yu Zhe, He, Ran, Ma, Yin Zhe, Liu, Bing Hai, Chen, Chang Qing, Tan, Pik Kee, Lam, Jeffrey, Mai, Zhi Hong
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
Published in 2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2017)
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Conference Proceeding
Rapid tooth movement through distraction osteogenesis of the periodontal ligament in dogs
Ai, Hong, Xu, Qing-feng, Lu, Hong-fei, Mai, Zhi-hui, An, Ai-qun, Liu, Guo-ping
Published in Chinese medical journal (05.03.2008)
Published in Chinese medical journal (05.03.2008)
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Journal Article
NANOSTRUCTURE FORMATION ON AMORPHOUS WO3 THIN FILMS IN AIR BY SCANNING TUNNELING MICROSCOPY
Qiu, H, Lu, Y-F, Mai, Z-H
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 1, pp. 290-294. 2001 (01.01.2001)
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 1, pp. 290-294. 2001 (01.01.2001)
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Journal Article
Identify Optical Proximity Correction (OPC) issue in 0.13 /spl mu/m technology development
Zhi Hong Mai, Benjamin Lau, Gang Qian, Jian Jun Shi, Ran He, Jessica Chin
Published in Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003 (2003)
Published in Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003 (2003)
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Conference Proceeding