Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
Sahir, Samrina, Yerriboina, Nagendra Prasad, Han, So-Young, Han, Kwang-Min, Kim, Tae-Gon, Mahadev, Niraj, Park, Jin-Goo
Published in Applied surface science (15.04.2021)
Published in Applied surface science (15.04.2021)
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Journal Article
Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process
Han, Kwang-Min, Han, So-Young, Sahir, Samrina, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Mahadev, Niraj, Park, Jin-Goo
Published in ECS journal of solid state science and technology (01.12.2020)
Published in ECS journal of solid state science and technology (01.12.2020)
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Journal Article
Influence of surface doping on sintering and microstructure of a superconducting oxide
Mukhopadhyay, Sharmila M., Garcia, Roberto, Mahadev, Niraj
Published in Physica. C, Superconductivity (20.02.1999)
Published in Physica. C, Superconductivity (20.02.1999)
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Journal Article