Lithography Options for the 32 nm Half Pitch Node and Beyond
Ronse, K., Jansen, P., Gronheid, R., Hendrickx, E., Maenhoudt, M., Wiaux, V., Goethals, A.-M., Jonckheere, R., Vandenberghe, G.
Published in IEEE transactions on circuits and systems. I, Regular papers (01.08.2009)
Published in IEEE transactions on circuits and systems. I, Regular papers (01.08.2009)
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Journal Article
Process Optimization and Integration of Trimethylsilane-Deposited α-SiC:H and α-SiCO:H Dielectric Thin Films for Damascene Processing
Gray, W. D., Loboda, M. J., Bremmer, J. N., Struyf, H., Lepage, M., Van Hove, M., Donaton, R. A., Sleeckx, E., Stucchi, M., Lanckmans, F., Gao, T., Boullart, W., Coenegrachts, B., Maenhoudt, M., Vanhaelemeersch, S., Meynen, H., Maex, K.
Published in Journal of the Electrochemical Society (01.07.2003)
Published in Journal of the Electrochemical Society (01.07.2003)
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Journal Article
Opportunities and Challenges in Immersion Lithography
Meanhoudt, M., Vandenberghe, G., Ercken, M., Cheng, S., Leunissen, P., Ronse, K.
Published in Journal of Photopolymer Science and Technology (01.01.2005)
Published in Journal of Photopolymer Science and Technology (01.01.2005)
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Journal Article
Integration of Cu and low- k dielectrics: effect of hard mask and dry etch on electrical performance of damascene structures
Donaton, R.A., Coenegrachts, B., Maenhoudt, M., Pollentier, I., Struyf, H., Vanhaelemeersch, S., Vos, I., Meuris, M., Fyen, W., Beyer, G., Tokei, Z., Stucchi, M., Vervoort, I., De Roest, D., Maex, K.
Published in Microelectronic engineering (01.03.2001)
Published in Microelectronic engineering (01.03.2001)
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Journal Article
Conference Proceeding
Characterisation and integration feasibility of JSR’s low- k dielectric LKD-5109
Das, A, Kokubo, T, Furukawa, Y, Struyf, H, Vos, I, Sijmus, B, Iacopi, F, Van. Aelst, J, Le, Q.T, Carbonell, L, Brongersma, S, Maenhoudt, M, Tokei, Z, Vervoort, I, Sleeckx, E, Stucchi, M, Schaekers, M, Boullart, W, Rosseel, E, Van Hove, M, Vanhaelemeersch, S, Shiota, A, Maex, K
Published in Microelectronic engineering (01.10.2002)
Published in Microelectronic engineering (01.10.2002)
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Journal Article
Conference Proceeding
Advances in Immersion Related Defectivity on XT:1250i at IMEC
Meanhoudt, M., Kocsis, M., Stepanenko, N., O'Brien, S., Heuvel, D. Van Den, Vangoidsenhoven, D., Gronheid, R., Benndorf, M., Nafus, K., Fyen, W., Kim, H-W, Kishimura, S., Ronse, K.
Published in Journal of Photopolymer Science and Technology (2006)
Published in Journal of Photopolymer Science and Technology (2006)
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Journal Article
Characterisation of JSR’s spin-on hardmask FF-02
Das, A., Le, Q.T., Furukawa, Y., Nguyen, V.H., Terzieva, V., de Theije, F., Whelan, C.M., Maenhoudt, M., Struyf, H., Tókei, Zs, Iacopi, F., Stucchi, M., Carbonell, L., Vos, I., Bender, H., Patz, M., Beyer, G., Van Hove, M., Maex, K.
Published in Microelectronic engineering (01.11.2003)
Published in Microelectronic engineering (01.11.2003)
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Journal Article
Conference Proceeding
3D-2D dimensional crossover in YBa2Cu3O7 films
Gao, ZX, Osquiguil, E, Maenhoudt, M, Wuyts, B, Libbrecht, S, Bruynseraede, Y
Published in Physical review letters (08.11.1993)
Published in Physical review letters (08.11.1993)
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Journal Article
Recent Progress in ArF Lithography for the 1OOnm Node
Goethals, A.M., Vandenberghe, G., Pollentier, I., Ercken, M., Bisschop, P. de, Maenhoudt, M., Ronse, K.
Published in Journal of Photopolymer Science and Technology (30.05.2001)
Published in Journal of Photopolymer Science and Technology (30.05.2001)
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Journal Article
YBa2Cu3Ox: a natural multilayer system with tunable anisotropy
Osquiguil, E, Gao, Z X, Maenhoudt, M, Wuyts, B, Libbrecht, S, Bruynseraede, Y
Published in Journal of physics. Condensed matter (16.08.1993)
Published in Journal of physics. Condensed matter (16.08.1993)
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Journal Article
Photoexcitation effects in YBa2Cu3Ox
OSQUIGUIL, E, MAENHOUDT, M, WUYTS, B, BRUYNSERAEDE, Y, LEDERMAN, D, NIEVA, G, GUIMPEL, J, SCHULLER, I. K
Published in Journal of alloys and compounds (10.05.1993)
Published in Journal of alloys and compounds (10.05.1993)
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Conference Proceeding
Journal Article
Ion beam synthesis of buried and surface nickel silicides during a single implantation step
Wu, M.F., De Wachter, J., Pattyn, H., Van Bavel, A.-M., Langouche, G., Vanhellemont, J., Bender, H., Maenhoudt, M., Bruynseraede, Y.
Published in Applied surface science (01.11.1993)
Published in Applied surface science (01.11.1993)
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Journal Article
Conference Proceeding
Photoinduced changes in high temperature superconducting films
Osquiguil, E, Maenhoudt, M, Wuyts, B, Bruynseraede, Y, Lederman, D, Schuller, Ivan K
Published in Physica scripta (01.01.1993)
Published in Physica scripta (01.01.1993)
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Journal Article
Conference Proceeding
Photoexcitation and oxygen ordering in YBa2Cu3Ox films
Osquiguil, E, Maenhoudt, M, Wuyts, B, Bruynseraede, Y, Lederman, D, Schuller, IK
Published in Physical review. B, Condensed matter (01.02.1994)
Published in Physical review. B, Condensed matter (01.02.1994)
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Journal Article
Enhancement of persistent photoconductivity in insulating high-Tc thin films
Hasen, J, Lederman, D, Schuller, IK, Kudinov, V, V, Maenhoudt, M, Bruynseraede, Y
Published in Physical review. B, Condensed matter (01.01.1995)
Published in Physical review. B, Condensed matter (01.01.1995)
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Journal Article
Protection of cattle from infection with vaccinia virus by bovine interferon alpha C
Schwers, A, Severin, J E, Bublot, M, Maenhoudt, M, Pastoret, P P, Vanden Broecke, C, Zilimwabagabo, P, Velan, B, Cohen, S, Shafferman, A
Published in Veterinary record (01.07.1989)
Published in Veterinary record (01.07.1989)
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Journal Article
Two different thermally activated flux-flow regimes in oxygen-deficient YBa2Cu3O7-x thin films
Qiu, XG, Wuyts, B, Maenhoudt, M, Moshchalkov, VV, Bruynseraede, Y
Published in Physical review. B, Condensed matter (01.07.1995)
Published in Physical review. B, Condensed matter (01.07.1995)
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Journal Article
Photoinduced changes in the transport properties of oxygen-deficient YBa2Cu3Ox
Nieva, G, Osquiguil, E, Guimpel, J, Maenhoudt, M, Wuyts, B, Bruynseraede, Y, Maple, MB, Schuller, IK
Published in Physical review. B, Condensed matter (01.12.1992)
Published in Physical review. B, Condensed matter (01.12.1992)
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