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Vacuum chuck and substrate processing apparatus including the same
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Design and fabrication of multilayer actuator using floating electrode
Maeng, Seo-Young, Lee, Dong-Kyun, Choi, Ji-Won, Kim, Hyun-Jai, Kang, Chong-Yun, Sahn-Nahm, Yoon, Seok-Jin
Published in Materials chemistry and physics (15.04.2005)
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