Silicon Trench Etch Uniformity Improvement for Microloading and Macro-to-Macro Loading for sub-14nmNode
Yang, Yong Mo, Lim, Sang Woo, Hong, Junsic, Park, Mira, Yang, Yinxiao, Cho, Wang Keun, Adams, Charlotte, Aminpur, Massud, Maeng, Chang Ho
Published in 2018 IEEE International Interconnect Technology Conference (IITC) (01.06.2018)
Published in 2018 IEEE International Interconnect Technology Conference (IITC) (01.06.2018)
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Conference Proceeding
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Year of Publication 21.08.2018
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METHODS FOR FORMING INTEGRATED CIRCUITS WITH REDUCED REPLACEMENT METAL GATE HEIGHT VARIABILITY
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Year of Publication 22.01.2015
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Year of Publication 22.01.2015
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SILOXANE AND ORGANIC-BASED MOL CONTACT PATTERNING
CAO Huy M, BATES Kenneth A, PAL Shyam, BOUCHE Guillaume, HUANG Haigou, LIU Huang, DAI Xintuo, KRISHNAN Bharat, WEI Andy, LIM SangWoo, SHENG Haifeng, LIU Jinping, HAN Ja-Hyung, OZZELLO Anthony, MAENG Chang Ho
Year of Publication 13.07.2017
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Year of Publication 13.07.2017
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Reducing gate height variance during semiconductor device formation
JHA ASHISH K, KIM TAE-HOON, SRIVATHANAKUL SONGKRAM, MAENG CHANG HO, WANG HAITING, LEE TAE HOON
Year of Publication 02.12.2014
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Year of Publication 02.12.2014
Patent
REDUCING GATE HEIGHT VARIANCE DURING SEMICONDUCTOR DEVICE FORMATION
JHA ASHISH K, KIM TAE-HOON, SRIVATHANAKUL SONGKRAM, MAENG CHANG HO, WANG HAITING, LEE TAE HOON
Year of Publication 10.07.2014
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Year of Publication 10.07.2014
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Semiconductor structures with coplanar recessed gate layers and fabrication methods
MAENG, CHANG HO, ORAIN, ISABELLE, TREVINO, KRISTINA, WONG, HOONG SHING, WELLS, GABRIEL PADRON, ZHANG, XING, KAMARTHY, GOWRI, UPADHYAYA, GANESH, HAN, TAEJOON, LIU, YUAN-HUNG
Year of Publication 01.04.2017
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Year of Publication 01.04.2017
Patent