Enhancing analysis efficiency: Automation of spectroscopic ellipsometry for crystalline semiconductors and transparent conductive oxides
Maeda, Sara, Tani, Yusuke, Katayama, Hirotaka, Kanematsu, Daiji, Oiwake, Kohei, Nishigaki, Yukinori, Miyadera, Tetsuhiko, Chikamatsu, Masayuki, Nagai, Takayuki, Aizawa, Takuma, Hanzawa, Kota, Hiramatsu, Hidenori, Terakawa, Akira, Hosono, Hideo, Fujiwara, Hiroyuki
Published in Thin solid films (31.12.2023)
Published in Thin solid films (31.12.2023)
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Fully automated spectroscopic ellipsometry analyses: Application to MoOx thin films
Oiwake, Kohei, Nishigaki, Yukinori, Fujimoto, Shohei, Maeda, Sara, Fujiwara, Hiroyuki
Published in arXiv.org (27.07.2021)
Published in arXiv.org (27.07.2021)
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Journal Article
Fully automated spectroscopic ellipsometry analyses of crystalline-phase semiconductors based on a new algorithm
Maeda, Sara, Oiwake, Kohei, Nishigaki, Yukinori, Miyadera, Tetsuhiko, Chikamatsu, Masayuki, Nagai, Takayuki, Aizawa, Takuma, Hanzawa, Kota, Hiramatsu, Hidenori, Hosono, Hideo, Fujiwara, Hiroyuki
Year of Publication 11.05.2022
Year of Publication 11.05.2022
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Journal Article
Fully automated spectroscopic ellipsometry analyses of crystalline-phase semiconductors based on a new algorithm
Maeda, Sara, Oiwake, Kohei, Nishigaki, Yukinori, Miyadera, Tetsuhiko, Chikamatsu, Masayuki, Nagai, Takayuki, Aizawa, Takuma, Hanzawa, Kota, Hiramatsu, Hidenori, Hosono, Hideo, Fujiwara, Hiroyuki
Published in arXiv.org (12.05.2022)
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Published in arXiv.org (12.05.2022)
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