Replacing libraries in scatterometry
Madsen, Jonas Skovlund Møller, Jensen, Søren Alkærsig, Nygård, Jesper, Hansen, Poul Erik
Published in Optics express (24.12.2018)
Published in Optics express (24.12.2018)
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Journal Article
In-line characterization of nanostructures produced by roll-to-roll nanoimprinting
Skovlund Madsen, Jonas, Geisler, Mathias, Berri Lotz, Mikkel, Zalkovskij, Maksim, Bilenberg, Brian, Korhonen, Raimo, Peltonen, Petri, Erik Hansen, Poul, Alkærsig Jensen, Søren
Published in Optics express (01.02.2021)
Published in Optics express (01.02.2021)
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Journal Article
Scatterometry for optimization of injection molded nanostructures at the fabrication line
Madsen, Jonas Skovlund, Jensen, Søren Alkærsig, Nakotte, Lars, Vogelsang, Arne, Thamdrup, Lasse Højlund, Czolkos, Ilja, Johansson, Alicia, Garnæs, Jørgen, Nielsen, Theodor, Nygård, Jesper, Hansen, Poul Erik
Published in International journal of advanced manufacturing technology (01.12.2018)
Published in International journal of advanced manufacturing technology (01.12.2018)
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Journal Article
Enhanced Measurement Accuracy for Nanostructures Using Hybrid Metrology
Hansen, Poul-Erik, Johannsen, Sabrina Rostgaard, Jensen, Søren Alkærsig, Madsen, Jonas Skovlund Møller
Published in Frontiers in physics (19.01.2022)
Published in Frontiers in physics (19.01.2022)
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Journal Article
Survey of Models for Acquiring the Optical Properties of Translucent Materials
Frisvad, J. R., Jensen, S. A., Madsen, J. S., Correia, A., Yang, L., Gregersen, S. K. S., Meuret, Y., Hansen, P.‐E.
Published in Computer graphics forum (01.05.2020)
Published in Computer graphics forum (01.05.2020)
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Journal Article
In-line characterization of nanostructured mass-produced polymer components using scatterometry
Madsen, Jonas Skovlund, Thamdrup, Lasse Højlund, Czolkos, Ilja, Hansen, Poul Erik, Johansson, Alicia, Garnaes, Jørgen, Nygård, Jesper, Madsen, Morten Hannibal
Published in Journal of micromechanics and microengineering (01.08.2017)
Published in Journal of micromechanics and microengineering (01.08.2017)
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Journal Article