On the origin of internal gettering suppression in low carbon CZ silicon by rapid thermal annealing
MADDALON-VINANTE, C, VALLARD, J. P, BARBIER, D
Published in Journal of the Electrochemical Society (01.02.1995)
Published in Journal of the Electrochemical Society (01.02.1995)
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Journal Article
Oxygen profiling in Czochralski-grown silicon substrates submitted to a rapid thermal annealing by using charged particles activation analysis
Erramli, H., Misdaq, M.A., Blondiaux, G., Maddalon-Vinante, C., Barbier, D.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.1998)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.1998)
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Study of the oxygen behaviour in thermally treated Czochralski silicon by combining CPAA with ion channeling
Erramli, H., Misdaq, M.A., Blondiaux, G., Maddalon-Vinante, C., Barbier, D.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.09.1996)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.09.1996)
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