Optimization of pre and post recipe sensitivity for unpattemed wafer defectivity inspection
Restaino, Darryl, Hurst, Nicole, Abrams, Todd, Parker, Alexander, Palamadai, Chandar, Arrandale, Mayrita, Macnish, Shawn
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
Track process monitoring via laser scattering imaging
Meli, Luciana, Kwong, Ranee, Murray, Cody J., Petrillo, Karen E., Hubbard, Alex R., Dhagat, Parul, Macnish, Shawn, Palamadai, Chandar
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Conference Proceeding
Inline composition and thickness control of SiON, HfSiON gate films using VUV capable spectroscopic ellipsometer
Rangarajan, Srinivasan, Shepard, Joseph, Min Dai, MacNish, Shawn, Qiang Zhao, Barnum, Jeff
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
Published in 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.07.2010)
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Conference Proceeding
Experimental investigation of the rapid thermal process slip window
Shepard, J F, Muth, W A, MacNish, S
Published in 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) (01.09.2010)
Published in 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) (01.09.2010)
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Conference Proceeding