High rate amorphous and crystalline silicon formation by pulsed DC magnetron sputtering deposition for photovoltaics
Bailey, Louise R., Proudfoot, Gary, Mackenzie, Brodie, Andersen, Niels, Karlsson, Arne, Ulyashin, Alexander
Published in Physica status solidi. A, Applications and materials science (01.01.2015)
Published in Physica status solidi. A, Applications and materials science (01.01.2015)
Get full text
Journal Article
High rate amorphous and crystalline silicon formation by pulsed DC magnetron sputtering deposition for photovoltaics: High rate amorphous and crystalline silicon formation
Bailey, Louise R., Proudfoot, Gary, Mackenzie, Brodie, Andersen, Niels, Karlsson, Arne, Ulyashin, Alexander
Published in Physica status solidi. A, Applications and materials science (01.01.2015)
Published in Physica status solidi. A, Applications and materials science (01.01.2015)
Get full text
Journal Article