Validation of THz absorption spectroscopy by a comparison with ps-TALIF measurements of atomic oxygen densities
Wubs, J. R., Invernizzi, L., Gazeli, K., Macherius, U., Lü, X., Schrottke, L., Lombardi, G., Weltmann, K.-D., van Helden, J. H.
Published in Applied physics letters (21.08.2023)
Published in Applied physics letters (21.08.2023)
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Journal Article
Sensitive CH4 detection applying quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy
Lang, N, Macherius, U, Wiese, M, Zimmermann, H, Röpcke, J, van Helden, J H
Published in Optics express (21.03.2016)
Published in Optics express (21.03.2016)
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Journal Article
Terahertz quantum-cascade lasers for high-resolution absorption spectroscopy of atoms and ions in plasmas
Lü, X, Röben, B, Biermann, K, Wubs, J R, Macherius, U, Weltmann, K-D, van Helden, J H, Schrottke, L, Grahn, H T
Published in Semiconductor science and technology (01.03.2023)
Published in Semiconductor science and technology (01.03.2023)
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Journal Article
Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas
Wubs, J R, Macherius, U, Weltmann, K-D, Lü, X, Röben, B, Biermann, K, Schrottke, L, Grahn, H T, van Helden, J H
Published in Plasma sources science & technology (01.02.2023)
Published in Plasma sources science & technology (01.02.2023)
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Journal Article
Sensitive CH 4 detection applying quantum cascade laser based optical feedback cavity-enhanced absorption spectroscopy
Lang, N, Macherius, U, Wiese, M, Zimmermann, H, Röpcke, J, van Helden, J H
Published in Optics express (21.03.2016)
Published in Optics express (21.03.2016)
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Journal Article
On treatment of ultra-low-k SiCOH in CF4 plasmas: correlation between the concentration of etching products and etching rate
Lang, N., Zimmermann, S., Zimmermann, H., Macherius, U., Uhlig, B., Schaller, M., Schulz, S. E., Röpcke, J.
Published in Applied physics. B, Lasers and optics (01.04.2015)
Published in Applied physics. B, Lasers and optics (01.04.2015)
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Journal Article
On the application of cw external cavity quantum cascade infrared lasers for plasma diagnostics
Lopatik, D, Lang, N, Macherius, U, Zimmermann, H, Röpcke, J
Published in Measurement science & technology (01.11.2012)
Published in Measurement science & technology (01.11.2012)
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Journal Article
Quantum-cascade lasers for terahertz high-resolution spectroscopy
Lu, X., Roben, B., Biermann, K., Schrottke, L., Wubs, J. R., Macherius, U., Weltmann, K.-D., van Helden, J. H., Grahn, H. T.
Published in 2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) (17.09.2023)
Published in 2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) (17.09.2023)
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Conference Proceeding
On treatment of ultra-low-k SiCOH in CF sub(4) plasmas: correlation between the concentration of etching products and etching rate
Lang, N, Zimmermann, S, Zimmermann, H, Macherius, U, Uhlig, B, Schaller, M, Schulz, SE, Ropcke, J
Published in Applied physics. B, Lasers and optics (01.04.2015)
Published in Applied physics. B, Lasers and optics (01.04.2015)
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Journal Article