Short pulse plasma immersion ion implantation of oxygen into silicon: determination of the energy distribution
Barradas, N.P., Maas, A.J.H., Mändl, S., Günzel, R.
Published in Surface & coatings technology (01.09.1997)
Published in Surface & coatings technology (01.09.1997)
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Journal Article
Conference Proceeding
Study of localised radiation damage to PIPS detectors by a scanning ion microprobe: Measured effects and the consequences for STIM analysis
Simons, D.P.L., Maas, A.J.H., Mutsaers, P.H.A., de Voigt, M.J.A.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.07.1997)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.07.1997)
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Journal Article
Comparison of computer generated and ERDA depth profiles of oxygen implanted into silicon with plasma immersion ion implantation
Barradas, N.P., Maas, A.J.H., Mändl, S.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.1997)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.1997)
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Journal Article
Recoil selection by pulse shape discrimination in elastic recoil detection analysis with α-particles (α-ERDA)
Maas, A.J.H., Klein, S.S., Simons, D.P.L., de Voigt, M.J.A.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.09.1996)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.09.1996)
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Journal Article