Study of surface reactions in atomic layer epitaxy of GaAs using trimethylgallium by reflectance difference spectroscopy and mass spectroscopy
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Conference Proceeding
Atmospheric pressure atomic layer epitaxy: mechanisms and applications
Daniel Dapkus, P., Maa, B.Y., Chen, Q., Jeong, W.G., DenBaars, S.P.
Published in Journal of crystal growth (1991)
Published in Journal of crystal growth (1991)
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Journal Article
Studies of TMGa adsorption on thin GaAs and InAs (001) layers
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Journal Article
Conference Proceeding
The role of surface and gas phase reactions in atomic layer epitaxy
Dapkus, P.D., DenBaars, S.P., Chen, Q., Jeong, W.G., Maa, B.Y.
Published in Progress in crystal growth and characterization (1989)
Published in Progress in crystal growth and characterization (1989)
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