Method for etching a semiconductor substrate using germanium hard mask
Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Ma, William H-L
Year of Publication 15.03.2005
Get full text
Year of Publication 15.03.2005
Patent
SIO stacked DRAM logic
Divakauni, Ramachandra, Hakey, Mark C, Ma, William H-L, Mandclman, Jack A, Tonti, William R
Year of Publication 08.07.2003
Get full text
Year of Publication 08.07.2003
Patent
Vertical dual gate field effect transistor
Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Leas, James M, Ma, William H-L, Rabidoux, Paul A
Year of Publication 13.02.2007
Get full text
Year of Publication 13.02.2007
Patent
SOI stacked DRAM logic
Divakauni, Ramachandra, Hakey, Mark C, Ma, William H.-L, Mandelman, Jack A, Tonti, William R
Year of Publication 08.04.2003
Get full text
Year of Publication 08.04.2003
Patent
Method of making differently sized vias and lines on the same lithography level
Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Ma, William H-L
Year of Publication 03.09.2002
Get full text
Year of Publication 03.09.2002
Patent
Vertical dual gate field effect transistor
Furukawa, Toshiharu, Hakey, Mark C, Holmes, Steven J, Horak, David V, Leas, James M, Ma, William H-L, Rabidoux, Paul A
Year of Publication 28.09.2004
Get full text
Year of Publication 28.09.2004
Patent
METHOD FOR FABRICATING VERTICAL DUAL GATE FIELD EFFECT TRANSISTOR
LEAS, JAMES, M, MA, WILLIAM, H., L, HAKEY, MARK, C, FURUKAWA, TOSHIHARU, HORAK, DAVID, V, HOLMES, STEVEN, J, RABIDOUX, PAUL, A
Year of Publication 05.08.2009
Get full text
Year of Publication 05.08.2009
Patent
Vertical dual gate field effect transistor
HAKEY MARK C, HOLMES STEVEN J, LEAS JAMES M, HORAK DAVID V, FURUKAWA TOSHIHARU, MA WILLIAM H-L, RABIDOUX PAUL A
Year of Publication 13.02.2007
Get full text
Year of Publication 13.02.2007
Patent
Method for etching a semiconductor substrate using germanium hard mask
HAKEY MARK C, HOLMES STEVEN J, HORAK DAVID V, FURUKAWA TOSHIHARU, MA WILLIAM H-L
Year of Publication 15.03.2005
Get full text
Year of Publication 15.03.2005
Patent
VERTICAL DUAL GATE FIELD EFFECT TRANSISTOR
LEAS, JAMES, M, MA, WILLIAM, H., L, HAKEY, MARK, C, FURUKAWA, TOSHIHARU, HORAK, DAVID, V, HOLMES, STEVEN, J, RABIDOUX, PAUL, A
Year of Publication 26.04.2006
Get full text
Year of Publication 26.04.2006
Patent