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An empirical three-dimensional crossover capacitance model for multilevel interconnect VLSI circuits
by
Wong, Shyh-Chyi
,
Lee, Trent Gwo-Yann
,
Ma, Dye-Junn
,
Chao, Chuan-Jane
Published in
IEEE transactions on semiconductor manufacturing
(01.05.2000)
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Journal Article
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economics
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engineering
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physics
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capacitance
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capacitance measurement
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chaos
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closed-form models
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crossover capacitance
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crossovers
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IEEE Xplore
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