WAFER SPOT HEATING WITH BEAM WIDTH MODULATION
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, NAKANISHI KOJI, NAKAGAWA TOSHIYUKI
Year of Publication 25.04.2024
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Year of Publication 25.04.2024
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중첩 서셉터 및 예열 링
YE ZHIYUAN, CONG ZHEPENG, MYO NYI O, CHU SCHUBERT, SHAH KARTIK BHUPENDRA, COLLINS RICHARD O
Year of Publication 22.05.2023
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Year of Publication 22.05.2023
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
YE ZHIYUAN, CHU SCHUBERT S, RAO PREETHAM, BAUTISTA KEVIN JOSEPH, HILKENE MARTIN A, MYO NYI O, GAJENDRA PALAMURALI, SANCHEZ ERROL ANTONIO C, COLLINS RICHARD O, HOLMGREN DOUGLAS E, SHAH KARTIK
Year of Publication 05.04.2024
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Year of Publication 05.04.2024
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EPI MULTI ZONE SPOT HEATING IN EPI
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, SANCHEZ ERROL ANTONIO C, NAKANISHI KOJI, RANISH JOSEPH M, NAKAGAWA TOSHIYUKI
Year of Publication 30.03.2022
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Year of Publication 30.03.2022
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뱃치 열 프로세스 챔버에서 웨이퍼 에지 온도 보정
PANDEY VISHWAS KUMAR, CHU SCHUBERT S, MORADIAN ALA, TANNOUS ADEL GEORGE, ZHU ZUOMING, BURROWS BRIAN HAYES, MYO NYI O, LAU SHU KWAN, RANGAPPA SRINIVASA, SHAH KARTIK BHUPENDRA, KUMAR SURAJIT
Year of Publication 28.11.2022
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Year of Publication 28.11.2022
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빔 폭 변조를 이용한 웨이퍼 스폿 가열
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, NAKANISHI KOJI, NAKAGAWA TOSHIYUKI
Year of Publication 13.01.2021
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Year of Publication 13.01.2021
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THERMAL PROCESSING SUSCEPTOR
YE ZHIYUAN, HUANG YI CHIAU, CONG ZHEPENG, BAUTISTA KEVIN JOSEPH, LO KIN PONG, BRILLHART PAUL, CHANG ANZHONG, NGO ANHTHU, TONG EDRIC, MACK JAMES FRANCIS, SHAH KARTIK, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, RAMACHANDRAN BALASUBRAMANIAN, LI XUEBIN
Year of Publication 03.08.2023
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Year of Publication 03.08.2023
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공유 가스 전달 및 배기 시스템을 갖는 다중-열 CVD 챔버들
YE ZHIYUAN, CHU SCHUBERT S, HILKENE MARTIN A, MYO NYI O, LAU SHU KWAN DANNY, WASHINGTON LORI, HEMKAR MANISH, COLLINS RICHARD O, BURROWS BRIAN H, DINIZ HERMAN
Year of Publication 25.08.2022
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Year of Publication 25.08.2022
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펄스 또는 프로파일 점 가열에 의한 EPI 두께 조정
YE ZHIYUAN, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, CHU SCHUBERT, SANCHEZ ERROL ANTONIO C
Year of Publication 07.10.2020
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Year of Publication 07.10.2020
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EPI에서의 다중 구역 스폿 가열
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, SANCHEZ ERROL ANTONIO C, NAKANISHI KOJI, RANISH JOSEPH M, NAKAGAWA TOSHIYUKI
Year of Publication 08.06.2020
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Year of Publication 08.06.2020
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조절가능한 광원을 위한 장치
CHU SCHUBERT S, GIRIDHAR KAMESH, MYO NYI O, KUMAR NAVJOT, GAJENDRA PALAMURALI
Year of Publication 24.10.2017
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Year of Publication 24.10.2017
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기판에 걸친 온도 프로파일을 최소화하기 위한 홈들을 갖는 평판형 서셉터
CHU SCHUBERT S, PATHAK NITIN, RAMANATHAN KARTHIK, CONG ZHEPENG, MYO NYI O, COLLINS RICHARD O, SHAH KARTIK
Year of Publication 27.07.2018
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Year of Publication 27.07.2018
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APPARATUS FOR GAS INJECTION TO EPITAXIAL CHAMBER
DUBE ABHISHEK, BAUTISTA KEVIN JOSEPH, MYO NYI O, LI XUEBIN, KIM YIHWAN, SHERVEGAR AVINASH
Year of Publication 22.02.2017
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Year of Publication 22.02.2017
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