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Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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EPI thickness tuning by pulse or profile spot heating
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Year of Publication 01.11.2019
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Year of Publication 01.11.2019
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Multi zone spot heating in epi
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Year of Publication 21.09.2020
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Year of Publication 01.08.2021
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Year of Publication 19.05.2016
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Year of Publication 19.05.2016
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SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK
BAUTISTA KEVIN JOSEPH, CONG ZHEPENG, LO KIN PONG, BRILLHART PAUL, CHANG ANZHONG, NGO ANHTHU, TONG EDRIC, COLLINS RICHARD O, SHAH KARTIK, CHU SCHUBERT S, PATHAK NITIN, RAMANATHAN KARTHIK, MYO NYI O, HEMKAR MANISH
Year of Publication 12.05.2016
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Year of Publication 12.05.2016
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Multi zone spot heating in EPI
YE ZHIYUAN, SANCHEZ EROL ANTONIO C, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU-KWAN, NAKANISHI KOJI, RANISH JOSEPH M, NAKAGAWA TOSHIYUKI
Year of Publication 09.06.2020
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Year of Publication 09.06.2020
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ATMOSPHERIC EPITAXIAL DEPOSITION CHAMBER
SAMIR MEHMET TUGRUL, HUNTER AARON MUIR, MILLER AARON, MYO NYI O, LAU SHU-KWAN, BRILLHART PAUL, SANCHEZ ERROL ANTONIO C, RANISH JOSEPH M, SHAH KARTIK, KUPPURAO SATHEESH, DEMARS DENNIS L
Year of Publication 10.03.2016
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Year of Publication 10.03.2016
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Wafer spot heating with beam width modulation
NAKAGAWA, TOSHIYUKI, LAU, SHU-KWAN, NAKANISHI, KOJI, ZHU, ZUO-MING, CHU, SCHUBERT S, MYO, NYI O, YE, ZHI-YUAN
Year of Publication 01.04.2020
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Year of Publication 01.04.2020
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SUBSTRATE THERMAL CONTROL IN AN EPI CHAMBER
LI, XUEBIN, BAUTISTA, KEVIN JOSEPH, CONG, ZHEPENG, NGO, ANHTHU, CHU, SCHUBERT S, ZHU, ZUOMING, BRILLHART, PAUL, HUANG, YIIAU, TONG, EDRIC, SHAH, KARTIK, MYO, NYI O, RAMACHANDRAN, BALASUBRAMANIAN
Year of Publication 30.12.2015
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Year of Publication 30.12.2015
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SUBSTRATE THERMAL CONTROL IN AN EPI CHAMBER
CHU SCHUBERT S, ZHU ZUOMING, BAUTISTA KEVIN JOSEPH, CONG ZHEPENG, MYO NYI O, HUANG YIIAU, RAMACHANDRAN BALASUBRAMANIAN, BRILLHART PAUL, NGO ANHTHU, TONG EDRIC, LI XUEBIN, SHAH KARTIK
Year of Publication 24.12.2015
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Year of Publication 24.12.2015
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THERMAL PROCESSING SUSCEPTOR
CHANG, ANZHONG, ZHU, ZUOMING, BRILLHART, PAUL, YE, ZHIYUAN, TONG, EDRIC, SHAH, KARTIK, RAMACHANDRAN, BALASUBRAMANIAN, LO, KIN, PONG, BAUTISTA, KEVIN, JOSEPH, MACK, JAMES, FRANCIS, LI, XUEBIN, CONG, ZHEPENG, NGO, ANHTHU, HUANG, YIIAU, CHU, SCHUBERT, S, MYO, NYI, O
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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