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Year of Publication 07.12.2011
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Year of Publication 12.03.2013
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Method and apparatus for detecting a liquid spray pattern
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Year of Publication 13.03.2007
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Year of Publication 13.03.2007
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Method and apparatus for detecting a liquid spray pattern
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Year of Publication 13.03.2007
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Year of Publication 13.03.2007
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METHOD OF PREPARING A SUBSTRATE FOR LITHOGRAPHY, A SUBSTRATE, A DEVICE MANUFACTURING METHOD, A SEALING COATING APPLICATOR AND A SEALING COATING MEASUREMENT APPARATUS
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Year of Publication 24.05.2012
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Year of Publication 24.05.2012
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Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
MYCKE JACQUES ROGER ALICE, WONG PATRICK, VAN DEN BOGAARD FREDERIK JOHANNES, DE VRIES DIRK, STAVENGA MARCO KOERT, BESSEMS DAVID, VAN DER HEIJDEN MARCUS THEODOOR WILHELMUS
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Year of Publication 14.02.2012
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Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus
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Year of Publication 14.02.2012
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Verfahren und Vorrichtung zur Messung und Regelung des Sprühmusters eines Flüssigkeitstrahls
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Year of Publication 05.03.2009
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Method and apparatus for detecting a liquid spray pattern
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Year of Publication 25.05.2005
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Year of Publication 25.05.2005
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METHOD AND APPARATUS FOR DETECTING A LIQUID SPRAY PATTERN
REIGHARD, MICHAEL, A, MYCKE, JACQUES, ESPENSCHIED, KENNETH, DONGES, WILLIAM, E
Year of Publication 20.04.2005
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Year of Publication 20.04.2005
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Method and apparatus for detecting a liquid spray pattern
REIGHARD MICHAEL A, MYCKE JACQUES, DONGES WILLIAM E, ESPENSCHIED KENNETH
Year of Publication 03.02.2005
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Year of Publication 03.02.2005
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Method and apparatus for measuring and adjusting a liquid spray pattern
BYERS, JOHN P, REIGHARD, MICHAEL A, MYCKE, JACQUES, VAN DER HEIJDEN, MARK, MINNICH, JEFFREY
Year of Publication 20.02.2008
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Year of Publication 20.02.2008
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METHOD AND APPARATUS FOR DETECTING A LIQUID SPRAY PATTERN
REIGHARD, MICHAEL, A, MYCKE, JACQUES, ESPENSCHIED, KENNETH, DONGES, WILLIAM, E
Year of Publication 30.06.2004
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Year of Publication 30.06.2004
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