SUBSTRATE FIXING DEVICE, ELECTROSTATIC CHUCK, AND MANUFACTURING METHOD OF ELECTROSTATIC CHUCK
MUTSUKAWA TAKAHIRO, ASAKAWA HIROYUKI, TAKEMOTO KEIICHI, HARAYAMA YOICHI
Year of Publication 25.05.2022
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Year of Publication 25.05.2022
Patent
Substrate fixing device, electrostatic chuck and manufacturing method of electrostatic chuck
MUTSUKAWA TAKAHIRO, ASAKAWA HIROYUKI, TAKEMOTO KEIICHI, HARAYAMA YOICHI
Year of Publication 13.05.2022
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Year of Publication 13.05.2022
Patent