NMOS contact resistivity reduction with implants into silicides
Rao, K. V., Khaja, Fareen Adeni, Ni, Chi-Nung, Muthukrishnan, Shankar, Darlak, Andrew, Lei, Jianxin, Brand, Adam, Variam, Naushad
Published in Physica status solidi. C (01.01.2014)
Published in Physica status solidi. C (01.01.2014)
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Journal Article
Enable abrupt junction and advanced salicide formation with dynamic surface annealing
Sun, Shiyu, Muthukrishnan, Shankar, Ng, Ben, Nagy, Stephen, Zojaji, Alan, Lapena, Rubi, Kim, Yihwan, Rao, Vivek, Kouzminov, Dimitry, Variam, Naushad, Moffatt, Stephen, Brand, Adam
Published in Physica status solidi. C (01.12.2012)
Published in Physica status solidi. C (01.12.2012)
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Journal Article
Advanced Millisecond Annealing Approaches for High-k Metal Gate and Contact Scaling
Sharma, Shashank, Chen, Jaujiun, Ng, Ben, McIntosh, Robert C, Muthukrishnan, Shankar, Raman Sharma, Karthik, Graoui, Houda, Mayur, Abhilash
Published in Meeting abstracts (Electrochemical Society) (23.07.2018)
Published in Meeting abstracts (Electrochemical Society) (23.07.2018)
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Journal Article
HYDROGENATION AND NITRIDIZATION PROCESSES FOR REDUCING OXYGEN CONTENT IN A FILM
SHARMA, Shashank, GRAOUI, Houda, SWENBERG, Johanes S, LIU, Wei, GEORGE, Rene, MUTHUKRISHNAN, Shankar
Year of Publication 23.05.2019
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Year of Publication 23.05.2019
Patent
Hydrogenation and nitridization processes for reducing oxygen content in a film
Graoui, Houda, George, Rene, Liu, Wei, Sharma, Shashank, Muthukrishnan, Shankar, Swenberg, Johanes S
Year of Publication 19.03.2019
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Year of Publication 19.03.2019
Patent
HYDROGENATION AND NITRIDIZATION PROCESSES FOR REDUCING OXYGEN CONTENT IN A FILM
LIU Wei, SHARMA Shashank, GRAOUI Houda, GEORGE Rene, SWENBERG Johanes S, MUTHUKRISHNAN Shankar
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
Patent
Integration of millisecond and spike anneals for dopant activation optimization
Shiyu Sun, Sharma, Shashank, Rao, K. V., Ng, Ben, Kouzminov, Dimitry, Colombeau, Ben, Variam, Naushad, Muthukrishnan, Shankar, Mayur, Abhilash, Brand, Adam
Published in 2013 13th International Workshop on Junction Technology (IWJT) (01.06.2013)
Published in 2013 13th International Workshop on Junction Technology (IWJT) (01.06.2013)
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Conference Proceeding
Irrigation Optimization for Agriculture Productivity: Case Study of a Hybrid Solar Microgrid in Rural India
Jayaraman, Janani, Sudhakar, Taruna, Muthukrishnan, Sai Shankar, Gopikanna, Aswin, Vijayaraghavan, Vineeth
Published in 2019 IEEE Global Humanitarian Technology Conference (GHTC) (01.10.2019)
Published in 2019 IEEE Global Humanitarian Technology Conference (GHTC) (01.10.2019)
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Conference Proceeding
Intelligent Interconnection of Operating Micro-grid and Irrigation System in Dharnai - A Rural Indian Scenario
Baskar, Hari Vignesh, Marjerie, S, Sridhar, Abishek Coimbatore, Muthukrishnan, Sai Shankar, Vijayaraghavan, Vineeth
Published in 2019 IEEE Global Humanitarian Technology Conference (GHTC) (01.10.2019)
Published in 2019 IEEE Global Humanitarian Technology Conference (GHTC) (01.10.2019)
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Conference Proceeding