Sequential in-situ heating and deposition of halogen-doped silicon oxide
MURUGESH LAXMAN, QIAO JIANMIN, SAHIN TURGUT, NARAWANKAR PRAVIN, ORCZYK MACIEK
Year of Publication 08.05.2001
Get full text
Year of Publication 08.05.2001
Patent
Two-part plastic retaining ring
MAHON, CHRISTOPHER R, KLINGLER, JAMES, BHATNAGAR, ASHISH, PAIK, YOUNG J, MURUGESH, LAXMAN, GOPALAKRISHNAN, PADMA, MEYER, STACY
Year of Publication 16.03.2013
Get full text
Year of Publication 16.03.2013
Patent
High deposition rate recipe for low dielectric constant films
QIAO; JIANMIN, SAHIN; TURGUT, ORCZYK; MACIEK, NARWANKAR; PRAVIN, MURUGESH; LAXMAN
Year of Publication 24.10.2000
Get full text
Year of Publication 24.10.2000
Patent
Directing a flow of gas in a substrate processing chamber
KRISHNARAJ, PADMANABHAN, COX, MICHAEL S, MURUGESH, LAXMAN, DUBEY, NARENDRA+, LAI, CANFENG
Year of Publication 01.09.2003
Get full text
Year of Publication 01.09.2003
Patent