Preparation of Copper Thin Films Utilizing Unbalanced Magnetron Sputtering Assisted by Inductively Coupled Plasma
EBOSHI, Ryo, MURAOKA, Yuuki, KUROKAWA, Shigeo, TACHIBANA, Akihiro, HASUI, Yuuki, KAWABATA, Keishi
Published in Journal of the Vacuum Society of Japan (2008)
Published in Journal of the Vacuum Society of Japan (2008)
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Journal Article
Effect of Substrate DC Bias Voltage and Anode Voltage on the Properties of Cu Films Using Magnetron Sputtering with Multipolar Magnetic Plasma Confinement Assisted by Inductively Coupled Plasma
MURAOKA, Yuuki, EBOSHI, Ryo, KUROKAWA, Shigeo, TATIBANA, Akihiro, HASUI, Yuki, KAWABATA, Keishi
Published in Journal of the Vacuum Society of Japan (2008)
Published in Journal of the Vacuum Society of Japan (2008)
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Journal Article
Position-controlled and catalyst-free growth of ZnO nanocrystals by nanoparticle-assisted pulsed laser deposition
Nakao, Shihomi, Muraoka, Yuuki, Higashihata, Mitsuhiro, Nakamura, Daisuke, Nakata, Yoshiki, Okada, Tatsuo
Published in Applied physics. A, Materials science & processing (01.10.2014)
Published in Applied physics. A, Materials science & processing (01.10.2014)
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誘導結合プラズマ支援型アンバランスマグネトロンスパッタ法による Cu 薄膜の作製
烏帽子, 良, 村岡, 裕紀, 黒川, 重雄, 橘, 瑛宏, 蓮井, 友城, 川畑, 敬志
Published in Journal of the Vacuum Society of Japan (2008)
Published in Journal of the Vacuum Society of Japan (2008)
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Journal Article
誘導結合プラズマ支援型多重磁極マグネトロンスパッタ法により作製したCu 薄膜に及ぼす陽極電圧と基板バイアス電圧の効果
村岡, 裕紀, 烏帽子, 良, 黒川, 重雄, 橘, 瑛宏, 蓮井, 友城, 川畑, 敬志
Published in Journal of the Vacuum Society of Japan (2008)
Published in Journal of the Vacuum Society of Japan (2008)
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Journal Article
CRANK SHAFT BEARING STRUCTURE OF INTERNAL COMBUSTION ENGINE
YAMANISHI TERUHIDE, NAMIKI KAZUAKI, MURAOKA YUUKI, HARADA NORITAKA, HARADA MAKOTO, TAKAHASHI RYOTA
Year of Publication 05.01.2015
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Year of Publication 05.01.2015
Patent
Output control apparatus for synchronous power generator
SHIMADA, NOBUHIRO, MURAOKA, YUUKI, NAKAJIMA, HIROYUKI, MORIYAMA, RYUJI
Year of Publication 26.10.2016
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Year of Publication 26.10.2016
Patent
Blowby gas control apparatus for internal combustion engine
SHIMADA, NOBUHIRO, MURAOKA, YUUKI, NAKAJIMA, HIROYUKI, MORIYAMA, RYUJI
Year of Publication 03.07.2013
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Year of Publication 03.07.2013
Patent