Resonant PZT MEMS Scanner for High-Resolution Displays
Baran, U., Brown, D., Holmstrom, S., Balma, D., Davis, W. O., Muralt, P., Urey, H.
Published in Journal of microelectromechanical systems (01.12.2012)
Published in Journal of microelectromechanical systems (01.12.2012)
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Journal Article
Domain Pinning: Comparison of Hafnia and PZT Based Ferroelectrics
Fengler, Franz P. G., Pešić, Milan, Starschich, Sergej, Schneller, Theodor, Künneth, Christopher, Böttger, Ulrich, Mulaosmanovic, Halid, Schenk, Tony, Park, Min Hyuk, Nigon, Robin, Muralt, Paul, Mikolajick, Thomas, Schroeder, Uwe
Published in Advanced electronic materials (01.04.2017)
Published in Advanced electronic materials (01.04.2017)
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Journal Article
Analysis of Performance Instabilities of Hafnia‐Based Ferroelectrics Using Modulus Spectroscopy and Thermally Stimulated Depolarization Currents
Fengler, Franz P. G., Nigon, Robin, Muralt, Paul, Grimley, Everett D., Sang, Xiahan, Sessi, Violetta, Hentschel, Rico, LeBeau, James M., Mikolajick, Thomas, Schroeder, Uwe
Published in Advanced electronic materials (01.03.2018)
Published in Advanced electronic materials (01.03.2018)
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Journal Article
{100}-Textured, piezoelectric Pb(Zrx, Ti1-x)O3 thin films for MEMS: integration, deposition and properties
LEDERMANN, Nicolas, MURALT, Paul, BABOROWSKI, Jacek, GENTIL, Sandrine, MUKATI, Kapil, CANTONI, Marco, SEIFERT, Andreas, SETTER, Nava
Published in Sensors and actuators. A. Physical. (01.07.2003)
Published in Sensors and actuators. A. Physical. (01.07.2003)
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Journal Article
Nanocrystalline Low-Refractive Magnesium Fluoride Films Deposited by Reactive Magnetron Sputtering: Optical and Structural Properties
Mertin, Stefan, Marot, Laurent, Sandu, Cosmin S., Steiner, Roland, Scartezzini, Jean-Louis, Muralt, Paul
Published in Advanced engineering materials (01.11.2015)
Published in Advanced engineering materials (01.11.2015)
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Journal Article
Dimensional and Structural Control of Silica Aerogel Membranes for Miniaturized Motionless Gas Pumps
Zhao, Shanyu, Jiang, Bo, Maeder, Thomas, Muralt, Paul, Kim, Nayoung, Matam, Santhosh Kumar, Jeong, Eunho, Han, Yen-Lin, Koebel, Matthias M
Published in ACS applied materials & interfaces (26.08.2015)
Published in ACS applied materials & interfaces (26.08.2015)
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Journal Article
High Piezoelectric Longitudinal Coefficients in Sol-gel PZT Thin Film Multilayers
Balma, Davide, Mazzalai, Andrea, Chidambaram, Nachiappan, Sandu, Cosmin S., Neels, Antonia, Dommann, Alex, Hess, Peter, Binz, Dieter, Muralt, Paul
Published in Journal of the American Ceramic Society (01.07.2014)
Published in Journal of the American Ceramic Society (01.07.2014)
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Journal Article
Mixed titania-lead oxide seed layers for PZT growth on Pt(111): a study on nucleation, texture and properties
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Journal Article
Conference Proceeding
Growth-mode induced defects in epitaxial SrTiO3 thin films grown on single crystal LaAlO3 by a two-step PLD process
Su, Dong, Yamada, Tomoaki, Gysel, Roman, Tagantsev, Alexander K., Muralt, Paul, Setter, Nava, Jiang, Nan
Published in Journal of materials research (28.03.2011)
Published in Journal of materials research (28.03.2011)
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Journal Article
Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
PRUME, Klaus, MURALT, Paul, CALAME, Florian, SCHMITZ-KEMPEN, Thorsten, TIEDKE, Stephan
Published in Journal of electroceramics (01.12.2007)
Published in Journal of electroceramics (01.12.2007)
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Conference Proceeding
Journal Article
Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
Sandu, Cosmin Silviu, Parsapour, Fazel, Mertin, Stefan, Pashchenko, Vladimir, Matloub, Ramin, LaGrange, Thomas, Heinz, Bernd, Muralt, Paul
Published in Physica status solidi. A, Applications and materials science (23.01.2019)
Published in Physica status solidi. A, Applications and materials science (23.01.2019)
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Journal Article