Etching Mechanisms of SiO2 and SiNx:H Thin Films in HF/Ethanol Vapor Phase: Toward High Selectivity Batch Release Processes
Guillemin, S., Mumbauer, P., Radtke, H., Fimberger, M., Fink, S., Kraxner, J., Faes, A., Siegert, J.
Published in Journal of microelectromechanical systems (01.08.2019)
Published in Journal of microelectromechanical systems (01.08.2019)
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Journal Article
Studies of solution processed metal oxides on silicon
Shanmugasundaram, K., Brubaker, M., Chang, K., Mumbauer, P., Roman, P., Ruzyllo, J.
Published in Microelectronic engineering (01.09.2007)
Published in Microelectronic engineering (01.09.2007)
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Conference Proceeding
Etching Mechanisms of SiO 2 and SiN x :H Thin Films in HF/Ethanol Vapor Phase: Toward High Selectivity Batch Release Processes
Guillemin, S., Mumbauer, P., Radtke, H., Fimberger, M., Fink, S., Kraxner, J., Faes, A., Siegert, J.
Published in Journal of microelectromechanical systems (01.08.2019)
Published in Journal of microelectromechanical systems (01.08.2019)
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Journal Article
Silicon surface treatments in advanced MOS gate processing
Chang, K., Shanmugasundaram, K., Lee, D.O., Roman, P., Wu, C.-T., Wang, J., Shallenberger, J., Mumbauer, P., Grant, R., Ridley, R., Dolny, G., Ruzyllo, J.
Published in Microelectronic engineering (01.04.2004)
Published in Microelectronic engineering (01.04.2004)
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Conference Proceeding
Studies of mist deposited high-k dielectrics for MOS gates
LEE, D.-O, ROMAN, P, WU, C.-T, MAHONEY, W, HORN, M, MUMBAUER, P, BRUBAKER, M, GRANT, R, RUZYLLO, J
Published in Microelectronic engineering (01.11.2001)
Published in Microelectronic engineering (01.11.2001)
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Conference Proceeding
Journal Article
Mist deposited high- k dielectrics for next generation MOS gates
Lee, D.-O, Roman, P, Wu, C.-T, Mumbauer, P, Brubaker, M, Grant, R, Ruzyllo, J
Published in Solid-state electronics (01.11.2002)
Published in Solid-state electronics (01.11.2002)
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Studies of high-k dielectrics deposited by liquid source misted chemical deposition in MOS gate structures
Ruzyllo, J., Lee, D.-O., Roman, P., Horn, M., Mumbauer, P., Brubaker, M., Grant, R.
Published in 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160) (2001)
Published in 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160) (2001)
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Conference Proceeding
Direct evidence of a bipolaron charge carrier in conducting polyazines from 13C and 15N solid-state NMR spectroscopy : detection of a nitrenium cation by natural abundance 15N solid-state NMR spectroscopy
CHALONER-GILL, B, EULER, W. B, MUMBAUER, P. D, ROBERTS, J. E
Published in Journal of the American Chemical Society (1991)
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Published in Journal of the American Chemical Society (1991)
Journal Article
Deposition and thermal processing of ferroelectric thin films with the primaxx 2f platform
Brubaker, Matt, Mumbauer, Paul D., Grant, Robert
Published in Integrated ferroelectrics (01.01.2001)
Published in Integrated ferroelectrics (01.01.2001)
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