3-inch single-crystal LiTaO3 films onto metallic electrode using Smart Cut™ technology
TAUZIN, A, DECHAMP, J, YOSHIMI, M, RIGNY, A, MADEIRA, F, MAZEN, F, ZUSSY, M, DEGUET, C, CLAVELIER, L, MOULET, J.-S, RICHTARCH, C, AKATSU, T
Published in Electronics letters (19.06.2008)
Published in Electronics letters (19.06.2008)
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Journal Article
Compensation of nonlinear hardening effect in a nanoelectromechanical torsional resonator
Laurent, L., Yon, J.J., Moulet, J.S., Imperinetti, P., Duraffourg, L.
Published in Sensors and actuators. A. Physical. (15.08.2017)
Published in Sensors and actuators. A. Physical. (15.08.2017)
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Journal Article
3-inch single-crystal LiTaO3 films onto metallic electrode using Smart CutTM technology
Tauzin, A., Dechamp, J., Madeira, F., Mazen, F., Zussy, M., Deguet, C., Clavelier, L., Moulet, J.-S., Richtarch, C., Akatsu, T., Yoshimi, M., Rigny, A.
Published in Electronics letters (2008)
Published in Electronics letters (2008)
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Journal Article
High piezoelectric properties in LiNbO3 transferred layer by the Smart Cut™ technology for ultra wide band BAW filter applications
Moulet, J.-S., Pijolat, M., Dechamp, J., Mazen, F., Tauzin, A., Rieutord, F., Reinhardt, A., Defay, E., Deguet, C., Ghyselen, B., Clavelier, L., Aid, M., Ballandras, S., Mazure, C.
Published in 2008 IEEE International Electron Devices Meeting (01.12.2008)
Published in 2008 IEEE International Electron Devices Meeting (01.12.2008)
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Conference Proceeding
Piezoresponse Force Microscopy study of a single-crystal LiTaO3 thin film obtained by the Smart Cut™ technology
Brugere, A, Moulet, J S, Gidon, S, Tchelnokov, A, Deguet, C, Clavelier, L, Ghyselen, B, Gautier, B
Published in 2010 IEEE International Symposium on the Applications of Ferroelectrics (ISAF) (01.08.2010)
Published in 2010 IEEE International Symposium on the Applications of Ferroelectrics (ISAF) (01.08.2010)
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Conference Proceeding
3-inch single-crystal LiTaO^sub 3^ films onto metallic electrode using Smart Cut^sup TM^ technology
Tauzin, A, Dechamp, J, Madeira, F, Mazen, F, Zussy, M, Deguet, C, Clavelier, L, Moulet, J-S, Richtarch, C, Akatsu, T, Yoshimi, M, Rigny, A
Published in Electronics letters (19.06.2008)
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Published in Electronics letters (19.06.2008)
Journal Article
3-inch single-crystal LiTaO sub( 3) films onto metallic electrode using Smart Cut super( TM) technology
Tauzin, A, Dechamp, J, Madeira, F, Mazen, F, Zussy, M, Deguet, C, Clavelier, L, Moulet, J-S, Richtarch, C, Akatsu, T, Yoshimi, M, Rigny, A
Published in Electronics letters (01.06.2008)
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Published in Electronics letters (01.06.2008)
Journal Article
Large Qxf product for HBAR using Smart Cut ™ transfer of LiNbO3 thin layers onto LiNbO3 substrate
Pijolat, M., Reinhardt, A., Defay, E., Deguet, C., Mercier, D., Aid, M., Moulet, J.S., Ghyselen, B., Gachon, D., Ballandras, S.
Published in 2008 IEEE Ultrasonics Symposium (01.11.2008)
Published in 2008 IEEE Ultrasonics Symposium (01.11.2008)
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Conference Proceeding
Mode conversion in high overtone bulk acoustic wave resonators
Pijolat, M., Mercier, D., Reinhardt, A., Defay, E., Deguet, C., Aid, M., Moulet, J.S., Ghyselen, B., Ballandras, S.
Published in 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum (01.04.2009)
Published in 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum (01.04.2009)
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Conference Proceeding