A Compact Aberration Corrector for SEMs with Electrostatic-field formed by Annular and Circular Electrodes
Kawasaki, Tadahiro, Yoshida, Ryuji, Kato, Takeharu, Nomaguchi, Tsunenori, Motomura, Shunichi, Nishinaka, Kenichi, Agemura, Toshihide, Ikuta, Takashi
Published in Microscopy and microanalysis (01.08.2019)
Published in Microscopy and microanalysis (01.08.2019)
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Journal Article
Development of Objective Aperture Holder for Mounting Compact Cs Corrector on Conventional SEM
Nomaguchi, Tsunenori, Motomura, Shunichi, Nishinaka, Kenichi, Agemura, Toshihide, Kawasaki, Tadahiro, Yoshida, Ryuji, Kato, Takeharu
Published in Microscopy and microanalysis (01.08.2018)
Published in Microscopy and microanalysis (01.08.2018)
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Journal Article
Spherical Aberration Correction for SEMs with Electrostatic-type Compact Cs-corrector
Kawasaki, Tadahiro, Yoshida, Ryuji, Kato, Takeharu, Nomaguchi, Tsunenori, Motomura, Shunichi, Nishinaka, Kenichi, Agemura, Toshihide, Tomita, Masahiro, Ikuta, Takashi
Published in Microscopy and microanalysis (01.08.2018)
Published in Microscopy and microanalysis (01.08.2018)
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Journal Article
CHARGED PARTICLE BEAM DEVICE
KAWASAKI Tadahiro, NOMAGUCHI Tsunenori, YOSHIDA Ryuji, MOTOMURA Shunichi
Year of Publication 03.10.2019
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Year of Publication 03.10.2019
Patent
CHARGED-PARTICLE BEAM DEVICE
KAWASAKI Tadahiro, NOMAGUCHI Tsunenori, YOSHIDA Ryuji, MOTOMURA Shunichi
Year of Publication 03.10.2019
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Year of Publication 03.10.2019
Patent
CHARGED PARTICLE BEAM DEVICE
NOMAGUCHI Tsunenori, AGEMURA Toshihide, NISHINAKA Kenichi, MOTOMURA Shunichi
Year of Publication 06.12.2018
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Year of Publication 06.12.2018
Patent
Microstructure analysis of β-FeSi2 grown on Ag-coated Si(001) substrate
Motomura, Shunichi, Hayashi, Kohei, Itakura, Masaru, Akiyama, Kensuke
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
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Journal Article
Evaluation of [beta]-FeSi sub(2)/Si-interface using Ag-coating on Si surface
Akiyama, Kensuke, Motomura, Shunichi, Hayashi, Gohei, Funakubo, Hiroshi, Itakura, Masaru
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
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Journal Article
Microstructure analysis of [beta]-FeSi2 grown on Ag-coated Si(001) substrate
Motomura, Shunichi, Hayashi, Kohei, Itakura, Masaru, Akiyama, Kensuke
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
Get full text
Journal Article
Evaluation of [beta]-FeSi2/Si-interface using Ag-coating on Si surface
Akiyama, Kensuke, Motomura, Shunichi, Hayashi, Gohei, Funakubo, Hiroshi, Itakura, Masaru
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
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Journal Article
Microstructure analysis of β‐FeSi 2 grown on Ag‐coated Si(001) substrate
Motomura, Shunichi, Hayashi, Kohei, Itakura, Masaru, Akiyama, Kensuke
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
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Journal Article
Evaluation of β‐FeSi 2 /Si‐interface using Ag‐coating on Si surface
Akiyama, Kensuke, Motomura, Shunichi, Hayashi, Gohei, Funakubo, Hiroshi, Itakura, Masaru
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
Get full text
Journal Article
Microstructure analysis of [beta]-FeSi sub(2) grown on Ag-coated Si(001) substrate
Motomura, Shunichi, Hayashi, Kohei, Itakura, Masaru, Akiyama, Kensuke
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
Get full text
Journal Article
Evaluation of β-FeSi2/Si-interface using Ag-coating on Si surface
Akiyama, Kensuke, Motomura, Shunichi, Hayashi, Gohei, Funakubo, Hiroshi, Itakura, Masaru
Published in Physica status solidi. C (01.12.2013)
Published in Physica status solidi. C (01.12.2013)
Get full text
Journal Article